JPH0711170Y2 - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPH0711170Y2
JPH0711170Y2 JP1989118795U JP11879589U JPH0711170Y2 JP H0711170 Y2 JPH0711170 Y2 JP H0711170Y2 JP 1989118795 U JP1989118795 U JP 1989118795U JP 11879589 U JP11879589 U JP 11879589U JP H0711170 Y2 JPH0711170 Y2 JP H0711170Y2
Authority
JP
Japan
Prior art keywords
substrate
thin film
film forming
dust removing
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989118795U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0359365U (OSRAM
Inventor
貞夫 門倉
公夫 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP1989118795U priority Critical patent/JPH0711170Y2/ja
Publication of JPH0359365U publication Critical patent/JPH0359365U/ja
Application granted granted Critical
Publication of JPH0711170Y2 publication Critical patent/JPH0711170Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1989118795U 1989-10-12 1989-10-12 薄膜形成装置 Expired - Lifetime JPH0711170Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989118795U JPH0711170Y2 (ja) 1989-10-12 1989-10-12 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989118795U JPH0711170Y2 (ja) 1989-10-12 1989-10-12 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0359365U JPH0359365U (OSRAM) 1991-06-11
JPH0711170Y2 true JPH0711170Y2 (ja) 1995-03-15

Family

ID=31666945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989118795U Expired - Lifetime JPH0711170Y2 (ja) 1989-10-12 1989-10-12 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0711170Y2 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002242131A (ja) * 2001-02-15 2002-08-28 Toko Guard Kk 交通誘導ロボット
JP4988283B2 (ja) * 2006-09-22 2012-08-01 パナソニック株式会社 照明システム
JP2016060942A (ja) * 2014-09-18 2016-04-25 東レエンジニアリング株式会社 薄膜形成装置、薄膜形成方法および薄膜付き基材

Also Published As

Publication number Publication date
JPH0359365U (OSRAM) 1991-06-11

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