JPH069495Y2 - 半導体ウェハなどのウエット処理装置 - Google Patents

半導体ウェハなどのウエット処理装置

Info

Publication number
JPH069495Y2
JPH069495Y2 JP1989000207U JP20789U JPH069495Y2 JP H069495 Y2 JPH069495 Y2 JP H069495Y2 JP 1989000207 U JP1989000207 U JP 1989000207U JP 20789 U JP20789 U JP 20789U JP H069495 Y2 JPH069495 Y2 JP H069495Y2
Authority
JP
Japan
Prior art keywords
wet processing
tank
drive source
semiconductor wafer
tub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989000207U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0291339U (enrdf_load_stackoverflow
Inventor
忠康 大沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP1989000207U priority Critical patent/JPH069495Y2/ja
Publication of JPH0291339U publication Critical patent/JPH0291339U/ja
Application granted granted Critical
Publication of JPH069495Y2 publication Critical patent/JPH069495Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP1989000207U 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置 Expired - Lifetime JPH069495Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000207U JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000207U JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Publications (2)

Publication Number Publication Date
JPH0291339U JPH0291339U (enrdf_load_stackoverflow) 1990-07-19
JPH069495Y2 true JPH069495Y2 (ja) 1994-03-09

Family

ID=31199029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000207U Expired - Lifetime JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Country Status (1)

Country Link
JP (1) JPH069495Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183032U (enrdf_load_stackoverflow) * 1984-11-05 1986-06-02

Also Published As

Publication number Publication date
JPH0291339U (enrdf_load_stackoverflow) 1990-07-19

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