JPH069488Y2 - 反応管終端の気密シ−ル部冷却装置 - Google Patents
反応管終端の気密シ−ル部冷却装置Info
- Publication number
- JPH069488Y2 JPH069488Y2 JP18452085U JP18452085U JPH069488Y2 JP H069488 Y2 JPH069488 Y2 JP H069488Y2 JP 18452085 U JP18452085 U JP 18452085U JP 18452085 U JP18452085 U JP 18452085U JP H069488 Y2 JPH069488 Y2 JP H069488Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- rubber packing
- ring
- water
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 title claims description 34
- 238000001816 cooling Methods 0.000 title claims description 10
- 229920001971 elastomer Polymers 0.000 claims description 31
- 238000012856 packing Methods 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 9
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18452085U JPH069488Y2 (ja) | 1985-12-02 | 1985-12-02 | 反応管終端の気密シ−ル部冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18452085U JPH069488Y2 (ja) | 1985-12-02 | 1985-12-02 | 反応管終端の気密シ−ル部冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6292635U JPS6292635U (enrdf_load_stackoverflow) | 1987-06-13 |
| JPH069488Y2 true JPH069488Y2 (ja) | 1994-03-09 |
Family
ID=31132274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18452085U Expired - Lifetime JPH069488Y2 (ja) | 1985-12-02 | 1985-12-02 | 反応管終端の気密シ−ル部冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069488Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2671979B2 (ja) * | 1986-05-30 | 1997-11-05 | 東京エレクトロン株式会社 | 加熱装置 |
-
1985
- 1985-12-02 JP JP18452085U patent/JPH069488Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6292635U (enrdf_load_stackoverflow) | 1987-06-13 |
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