JPH067337Y2 - 分光器波長駆動装置 - Google Patents

分光器波長駆動装置

Info

Publication number
JPH067337Y2
JPH067337Y2 JP19928286U JP19928286U JPH067337Y2 JP H067337 Y2 JPH067337 Y2 JP H067337Y2 JP 19928286 U JP19928286 U JP 19928286U JP 19928286 U JP19928286 U JP 19928286U JP H067337 Y2 JPH067337 Y2 JP H067337Y2
Authority
JP
Japan
Prior art keywords
motor
feed
fine
excitation phase
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19928286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63107836U (enExample
Inventor
修三 林
幸治 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP19928286U priority Critical patent/JPH067337Y2/ja
Publication of JPS63107836U publication Critical patent/JPS63107836U/ja
Application granted granted Critical
Publication of JPH067337Y2 publication Critical patent/JPH067337Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
JP19928286U 1986-12-30 1986-12-30 分光器波長駆動装置 Expired - Lifetime JPH067337Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19928286U JPH067337Y2 (ja) 1986-12-30 1986-12-30 分光器波長駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19928286U JPH067337Y2 (ja) 1986-12-30 1986-12-30 分光器波長駆動装置

Publications (2)

Publication Number Publication Date
JPS63107836U JPS63107836U (enExample) 1988-07-12
JPH067337Y2 true JPH067337Y2 (ja) 1994-02-23

Family

ID=31160761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19928286U Expired - Lifetime JPH067337Y2 (ja) 1986-12-30 1986-12-30 分光器波長駆動装置

Country Status (1)

Country Link
JP (1) JPH067337Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6222501B2 (ja) * 2016-05-09 2017-11-01 株式会社島津製作所 分光装置

Also Published As

Publication number Publication date
JPS63107836U (enExample) 1988-07-12

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