JPH06698Y2 - クリーンルーム汚染防止用マニホールド - Google Patents

クリーンルーム汚染防止用マニホールド

Info

Publication number
JPH06698Y2
JPH06698Y2 JP292688U JP292688U JPH06698Y2 JP H06698 Y2 JPH06698 Y2 JP H06698Y2 JP 292688 U JP292688 U JP 292688U JP 292688 U JP292688 U JP 292688U JP H06698 Y2 JPH06698 Y2 JP H06698Y2
Authority
JP
Japan
Prior art keywords
fluid
manifold
clean room
seal portion
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP292688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01108468U (enExample
Inventor
康宏 大澤
正幸 森谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP292688U priority Critical patent/JPH06698Y2/ja
Publication of JPH01108468U publication Critical patent/JPH01108468U/ja
Application granted granted Critical
Publication of JPH06698Y2 publication Critical patent/JPH06698Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Valve Housings (AREA)
  • Gasket Seals (AREA)
JP292688U 1988-01-13 1988-01-13 クリーンルーム汚染防止用マニホールド Expired - Lifetime JPH06698Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP292688U JPH06698Y2 (ja) 1988-01-13 1988-01-13 クリーンルーム汚染防止用マニホールド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP292688U JPH06698Y2 (ja) 1988-01-13 1988-01-13 クリーンルーム汚染防止用マニホールド

Publications (2)

Publication Number Publication Date
JPH01108468U JPH01108468U (enExample) 1989-07-21
JPH06698Y2 true JPH06698Y2 (ja) 1994-01-05

Family

ID=31204113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP292688U Expired - Lifetime JPH06698Y2 (ja) 1988-01-13 1988-01-13 クリーンルーム汚染防止用マニホールド

Country Status (1)

Country Link
JP (1) JPH06698Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109154388A (zh) * 2016-06-10 2019-01-04 纳博特斯克有限公司 垫片以及阀装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109154388A (zh) * 2016-06-10 2019-01-04 纳博特斯克有限公司 垫片以及阀装置

Also Published As

Publication number Publication date
JPH01108468U (enExample) 1989-07-21

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