JPH066443Y2 - 電子ビームプローバにおける試料装着機構 - Google Patents

電子ビームプローバにおける試料装着機構

Info

Publication number
JPH066443Y2
JPH066443Y2 JP3533088U JP3533088U JPH066443Y2 JP H066443 Y2 JPH066443 Y2 JP H066443Y2 JP 3533088 U JP3533088 U JP 3533088U JP 3533088 U JP3533088 U JP 3533088U JP H066443 Y2 JPH066443 Y2 JP H066443Y2
Authority
JP
Japan
Prior art keywords
cable
tester
electron beam
mounting mechanism
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3533088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01140750U (enExample
Inventor
敏則 篠岡
誠 窪山
裕博 若月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3533088U priority Critical patent/JPH066443Y2/ja
Publication of JPH01140750U publication Critical patent/JPH01140750U/ja
Application granted granted Critical
Publication of JPH066443Y2 publication Critical patent/JPH066443Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3533088U 1988-03-18 1988-03-18 電子ビームプローバにおける試料装着機構 Expired - Lifetime JPH066443Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3533088U JPH066443Y2 (ja) 1988-03-18 1988-03-18 電子ビームプローバにおける試料装着機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3533088U JPH066443Y2 (ja) 1988-03-18 1988-03-18 電子ビームプローバにおける試料装着機構

Publications (2)

Publication Number Publication Date
JPH01140750U JPH01140750U (enExample) 1989-09-27
JPH066443Y2 true JPH066443Y2 (ja) 1994-02-16

Family

ID=31261985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3533088U Expired - Lifetime JPH066443Y2 (ja) 1988-03-18 1988-03-18 電子ビームプローバにおける試料装着機構

Country Status (1)

Country Link
JP (1) JPH066443Y2 (enExample)

Also Published As

Publication number Publication date
JPH01140750U (enExample) 1989-09-27

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