JPH0655459A - Level plate for surface grinder and its manufacture - Google Patents

Abstract

PURPOSE:To provide a level plate for a horizontal grinder which makes pellets hardly come off, and well holds abrasive solution. CONSTITUTION:A plural number of grinding pellets 3 composed of diamond abrasive grains are attached to the surface of a metallic level plate main body 2 in a doughnut shape in a desired arrangement pattern while being spaced as one wishes, and concurrently synthetic resin 4 is filled in each gap between the respective pellets, so that the level plate 1 is thereby formed. By this constitution, since the circumference of each pellet 3 is sealed so as to be hardened with synthetic resin 4, each pellet hardly comes off. Since grooves from which abrasive solution flows out, are blocked with each gap between the respective pellets 3 filled in with synthetic resin 4, abrasive solution is well held therein.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface polishing apparatus for polishing a plate-shaped or block-shaped work such as semiconductor, glass, ceramic, metal, etc. It is about the method.

[0002]

2. Description of the Related Art As a surface plate used for a flat surface polishing apparatus such as a lapping machine, as disclosed in Japanese Utility Model Publication No. 52-171791, a large number of grinding stone pieces (pellets) are predetermined on the surface plate. It is known that they are installed at intervals.

However, since such a conventional surface plate is formed by sticking pellets of a specific height on the surface of the surface plate, each pellet stands up on the surface of the surface plate, and the pellets are acted upon by a slight impact. There is a drawback that it easily falls off, and even if one pellet falls off, it becomes a large space after that, and if the work being processed is small, it collides with other pellets when the work passes through the space, It was easy for the work to break and new pellets to fall off. Even if the dropped pellets are re-attached to their original positions, the heights of the other pellets are not aligned and the processing cannot be continued.

Further, since the pellets are attached at intervals, a concave groove is formed between the pellets, and the polishing liquid supplied to the surface plate during polishing is rapidly moved along the concave groove. There is also a drawback that the cutting speed is reduced and the polishing efficiency is poor because it flows out too much.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to provide a platen for a flat polishing apparatus, in which pellets are less likely to fall off and the polishing liquid retainability is excellent.

[0006]

In order to solve the above-mentioned problems, the surface plate of the present invention has a plurality of polishing pellets mounted on the surface of the surface plate body at the same height in a desired array pattern and at the same intervals. It is characterized in that a gap between pellets is filled with a synthetic resin.

Further, in the method of manufacturing a surface plate of the present invention, a plurality of polishing pellets are attached to the surface of the surface plate main body in a desired arrangement pattern and at intervals, and after filling the spaces between the pellets with a synthetic resin, A method of manufacturing a surface plate for a flat surface polishing apparatus, which comprises performing surface processing for positioning a pellet surface in the same plane.

[0008]

In the platen, since the surroundings of each pellet are solidified with synthetic resin, the mounting strength of the pellet is very large, and each pellet is embedded in the synthetic resin and directly impacted from the outside. Because it is difficult, pellets are unlikely to fall off due to impact. In addition, since the gaps between the pellets are filled with resin and the polishing liquid does not flow out too rapidly through the gaps between the pellets unlike the conventional ones, the retention of the polishing liquid is good and the polishing efficiency is high. Is good.

[0009]

Embodiments of the present invention will now be described in detail with reference to the drawings. The surface plate 1 shown in FIGS. 1 and 2 is a donut-shaped metal surface plate main body 2 having a surface It is configured by mounting a plurality of polishing pellets 3 at the same height in a desired array pattern and at the same intervals, and filling the gaps between the pellets with the synthetic resin 4.

The pellet 3 is a vitrified bond type diamond pellet obtained by hardening diamond abrasive grains with clay as a binder, and has a diameter of 20 mm and a height of 3 to 5 m.
A plurality of concentric circles m formed in a disk shape of about m and positioned at desired intervals on the surface of the surface plate body 2 and the center O of the surface plate body 2.
Are arranged such that the number of pellets on each circumferential row is the same and the pellets on the adjacent radial rows are located on different circumferential rows at intersections with a plurality of radiation n extending at equal angles from And is attached to the surface plate body 2 by means such as adhesion. However, the types of the abrasive grains and the binder forming the pellets 3, the shape of the pellets 3, the arrangement pattern of the pellets 3 and the intervals are arbitrary, and are not limited to those of the embodiment.

The synthetic resin 4 to be filled between the pellets 3 is preferably a thermosetting resin that is softer than the pellets 3 but has sufficient hardness to hold each pellet from the surroundings. Epoxy resins are preferably used. The synthetic resin 4 is filled on the surface of the surface plate main body 2 to which the pellets 3 are attached at substantially the same height as the pellets 3, and then the inner peripheral surface 4a and the outer periphery of the donut-shaped synthetic resin 4 are formed. Grinding the surface 4b in accordance with the surface plate main body 2 and performing grinding molding on the surfaces of the pellets 3 and the synthetic resin 4 for positioning the pellet surface and the synthetic resin surface in the same plane. The above surface plate 1
Is formed.

The surface plate 1 having the above structure is attached to a flat surface polishing apparatus such as a lapping machine, and a plate-shaped or block-shaped work is polished by a known method. At this time, since the synthetic resin 4 is softer than the pellet 3, the synthetic resin 4 is scraped earlier than the pellet 3, and a space between the pellet 3 surface and the synthetic resin 4 surface is always appropriate as shown in FIG. Will result in a height difference d.

Further, since the gap between the pellets 3 and 3 is filled with the synthetic resin 4, the polishing liquid may rapidly flow out of the plate through the gap between the pellets like a conventional surface plate. There is no problem, the polishing liquid retainability is good, and the required amount of polishing liquid is always present on the pellet surface, resulting in good polishing efficiency.

Further, since the area around each pellet 3 is solidified with the synthetic resin 4, the mounting strength of the pellet 3 is very large, and the individual pellets are not easily directly impacted from the outside. Therefore, the pellet does not fall off due to impact.

[0015]

As described above, according to the present invention, by solidifying the periphery of the pellets attached to the platen body with the synthetic resin, it is possible to easily form the platen in which the pellets do not easily drop and the polishing liquid retainability is excellent. Can be obtained.

[Brief description of drawings]

FIG. 1 is a plan view showing one embodiment of a surface plate for a surface polishing apparatus according to the present invention.

FIG. 2 is an enlarged sectional view of a main part of the surface plate of FIG.

FIG. 3 is a cross-sectional view of an essential part showing a state when the surface plate shown in FIG. 1 is used.

[Explanation of symbols]

 1 surface plate 2 surface plate body 3 pellets 4 synthetic resin

Claims (2)

[Claims] 1. A flat surface comprising a plurality of polishing pellets mounted on the surface of a surface plate main body at the same height in a desired arrangement pattern and spacing, and a space between the pellets being filled with a synthetic resin. Surface plate for polishing equipment. 2. A plurality of polishing pellets are mounted on the surface of the surface plate main body in a desired arrangement pattern and spacing, and after filling the gaps between the pellets with synthetic resin, each pellet surface is positioned in the same plane. A method of manufacturing a surface plate for a flat surface polishing apparatus, characterized in that the surface treatment of (1) is performed.