JPH0650980Y2 - 基板回転機構付きカーボンペデスタル - Google Patents
基板回転機構付きカーボンペデスタルInfo
- Publication number
- JPH0650980Y2 JPH0650980Y2 JP705189U JP705189U JPH0650980Y2 JP H0650980 Y2 JPH0650980 Y2 JP H0650980Y2 JP 705189 U JP705189 U JP 705189U JP 705189 U JP705189 U JP 705189U JP H0650980 Y2 JPH0650980 Y2 JP H0650980Y2
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- carbon
- substrate
- carbon pedestal
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 title claims description 20
- 229910052799 carbon Inorganic materials 0.000 title claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 title claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000006698 induction Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 2
- 230000012010 growth Effects 0.000 description 6
- 150000001721 carbon Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705189U JPH0650980Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板回転機構付きカーボンペデスタル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705189U JPH0650980Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板回転機構付きカーボンペデスタル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0298628U JPH0298628U (enrdf_load_stackoverflow) | 1990-08-06 |
| JPH0650980Y2 true JPH0650980Y2 (ja) | 1994-12-21 |
Family
ID=31211739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP705189U Expired - Fee Related JPH0650980Y2 (ja) | 1989-01-26 | 1989-01-26 | 基板回転機構付きカーボンペデスタル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650980Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6683545B2 (ja) * | 2016-06-15 | 2020-04-22 | 文治 松本 | 歯ブラシ |
-
1989
- 1989-01-26 JP JP705189U patent/JPH0650980Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0298628U (enrdf_load_stackoverflow) | 1990-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |