JPH01153634U - - Google Patents

Info

Publication number
JPH01153634U
JPH01153634U JP4660288U JP4660288U JPH01153634U JP H01153634 U JPH01153634 U JP H01153634U JP 4660288 U JP4660288 U JP 4660288U JP 4660288 U JP4660288 U JP 4660288U JP H01153634 U JPH01153634 U JP H01153634U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
barrel
thin film
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4660288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627946Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4660288U priority Critical patent/JPH0627946Y2/ja
Publication of JPH01153634U publication Critical patent/JPH01153634U/ja
Application granted granted Critical
Publication of JPH0627946Y2 publication Critical patent/JPH0627946Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4660288U 1988-04-05 1988-04-05 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部 Expired - Lifetime JPH0627946Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4660288U JPH0627946Y2 (ja) 1988-04-05 1988-04-05 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4660288U JPH0627946Y2 (ja) 1988-04-05 1988-04-05 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部

Publications (2)

Publication Number Publication Date
JPH01153634U true JPH01153634U (enrdf_load_stackoverflow) 1989-10-23
JPH0627946Y2 JPH0627946Y2 (ja) 1994-07-27

Family

ID=31272869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4660288U Expired - Lifetime JPH0627946Y2 (ja) 1988-04-05 1988-04-05 縦型薄膜気相成長装置のバレル型サセプタ装着ウエハ加熱部

Country Status (1)

Country Link
JP (1) JPH0627946Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653145A (ja) * 1992-07-28 1994-02-25 Ngk Insulators Ltd 半導体ウェハー加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653145A (ja) * 1992-07-28 1994-02-25 Ngk Insulators Ltd 半導体ウェハー加熱装置

Also Published As

Publication number Publication date
JPH0627946Y2 (ja) 1994-07-27

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