JPH0189954U - - Google Patents

Info

Publication number
JPH0189954U
JPH0189954U JP18463987U JP18463987U JPH0189954U JP H0189954 U JPH0189954 U JP H0189954U JP 18463987 U JP18463987 U JP 18463987U JP 18463987 U JP18463987 U JP 18463987U JP H0189954 U JPH0189954 U JP H0189954U
Authority
JP
Japan
Prior art keywords
crucible
electron beam
annular
evaporation source
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18463987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18463987U priority Critical patent/JPH0189954U/ja
Publication of JPH0189954U publication Critical patent/JPH0189954U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18463987U 1987-12-03 1987-12-03 Pending JPH0189954U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18463987U JPH0189954U (enrdf_load_stackoverflow) 1987-12-03 1987-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18463987U JPH0189954U (enrdf_load_stackoverflow) 1987-12-03 1987-12-03

Publications (1)

Publication Number Publication Date
JPH0189954U true JPH0189954U (enrdf_load_stackoverflow) 1989-06-13

Family

ID=31475983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18463987U Pending JPH0189954U (enrdf_load_stackoverflow) 1987-12-03 1987-12-03

Country Status (1)

Country Link
JP (1) JPH0189954U (enrdf_load_stackoverflow)

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