JPH0189954U - - Google Patents
Info
- Publication number
- JPH0189954U JPH0189954U JP18463987U JP18463987U JPH0189954U JP H0189954 U JPH0189954 U JP H0189954U JP 18463987 U JP18463987 U JP 18463987U JP 18463987 U JP18463987 U JP 18463987U JP H0189954 U JPH0189954 U JP H0189954U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- electron beam
- annular
- evaporation source
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本実施例に係る蒸発源のるつぼの形
状を示す斜視図、第２図は本実施例に係る蒸発源
のるつぼの形状を示す平面図、第３図は本実施例
に係る蒸発源のるつぼの形状を示す断面図、第４
図は本実施例に係る蒸発源のるつぼにおける電子
ビーム照射位置を示す説明図、第５図は、ハース
１の回転駆動機構の説明図、第６図は、蒸発物質
補給機構の一例を示す説明図、第７図は、本実施
例に係る蒸発源を用いた蒸着装置を示す説明図、
第８図は、従来例に係る電子ビーム加熱蒸発源の
説明図である。第９図は従来例に係る、るつぼか
らの蒸発材料の消費の過程を示す説明図である。
１０……ハース、２０……るつぼ、３０……電
子ビーム被供給部、４０……材料供給部位、５０
……回転軸。
FIG. 1 is a perspective view showing the shape of the crucible of the evaporation source according to the present example, FIG. 2 is a plan view showing the shape of the crucible of the evaporation source according to the present example, and FIG. 3 is a perspective view showing the shape of the crucible of the evaporation source according to the present example. Cross-sectional view showing the shape of the crucible of the evaporation source, No. 4
The figure is an explanatory diagram showing the electron beam irradiation position in the crucible of the evaporation source according to this embodiment, FIG. 5 is an explanatory diagram of the rotational drive mechanism of the hearth 1, and FIG. 6 is an explanatory diagram showing an example of the evaporated substance replenishment mechanism. 7 are explanatory diagrams showing a vapor deposition apparatus using an evaporation source according to this embodiment,
FIG. 8 is an explanatory diagram of a conventional electron beam heating evaporation source. FIG. 9 is an explanatory diagram showing the process of consumption of evaporated material from a crucible according to a conventional example. 10... Hearth, 20... Crucible, 30... Electron beam supplied part, 40... Material supply part, 50
……Axis of rotation.
Claims (1)
回転駆動手段と、 該るつぼ内の一部に形成された電子ビーム被照
射部と、 前記るつぼ内の電子ビーム被照射部以外に蒸発
材料を補給する材料供給装置と、 を具備した電子ビーム加熱式蒸発源。 (2) 前記材料供給装置は、輪状るつぼの電子ビ
ーム被照射部より回転方向の先に蒸発材料を補給
する実用新案登録請求の範囲第１項記載の電子ビ
ーム加熱式蒸発源。[Claims for Utility Model Registration] (1) An annular crucible that holds an evaporated material, a rotation drive means for rotating the annular crucible around the center of the annular axis, and an electron beam formed in a part of the crucible. An electron beam heated evaporation source comprising: an irradiated section; and a material supply device that supplies evaporation material to areas other than the electron beam irradiated section in the crucible. (2) The electron beam heating type evaporation source according to claim 1, wherein the material supply device supplies the evaporation material to a rotational direction ahead of the electron beam irradiated part of the annular crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463987U JPH0189954U (en) | 1987-12-03 | 1987-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463987U JPH0189954U (en) | 1987-12-03 | 1987-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189954U true JPH0189954U (en) | 1989-06-13 |
Family
ID=31475983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18463987U Pending JPH0189954U (en) | 1987-12-03 | 1987-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189954U (en) |
-
1987
- 1987-12-03 JP JP18463987U patent/JPH0189954U/ja active Pending