JPS63110565U - - Google Patents

Info

Publication number
JPS63110565U
JPS63110565U JP90287U JP90287U JPS63110565U JP S63110565 U JPS63110565 U JP S63110565U JP 90287 U JP90287 U JP 90287U JP 90287 U JP90287 U JP 90287U JP S63110565 U JPS63110565 U JP S63110565U
Authority
JP
Japan
Prior art keywords
evaporation source
trine
pieces
electron beam
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP90287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP90287U priority Critical patent/JPS63110565U/ja
Publication of JPS63110565U publication Critical patent/JPS63110565U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP90287U 1987-01-06 1987-01-06 Pending JPS63110565U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP90287U JPS63110565U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP90287U JPS63110565U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Publications (1)

Publication Number Publication Date
JPS63110565U true JPS63110565U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30778305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP90287U Pending JPS63110565U (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Country Status (1)

Country Link
JP (1) JPS63110565U (enrdf_load_stackoverflow)

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