JPS6399747U - - Google Patents

Info

Publication number
JPS6399747U
JPS6399747U JP19515286U JP19515286U JPS6399747U JP S6399747 U JPS6399747 U JP S6399747U JP 19515286 U JP19515286 U JP 19515286U JP 19515286 U JP19515286 U JP 19515286U JP S6399747 U JPS6399747 U JP S6399747U
Authority
JP
Japan
Prior art keywords
filament
heat
plasma generation
sample
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19515286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19515286U priority Critical patent/JPS6399747U/ja
Publication of JPS6399747U publication Critical patent/JPS6399747U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP19515286U 1986-12-18 1986-12-18 Pending JPS6399747U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19515286U JPS6399747U (enrdf_load_stackoverflow) 1986-12-18 1986-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19515286U JPS6399747U (enrdf_load_stackoverflow) 1986-12-18 1986-12-18

Publications (1)

Publication Number Publication Date
JPS6399747U true JPS6399747U (enrdf_load_stackoverflow) 1988-06-28

Family

ID=31152779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19515286U Pending JPS6399747U (enrdf_load_stackoverflow) 1986-12-18 1986-12-18

Country Status (1)

Country Link
JP (1) JPS6399747U (enrdf_load_stackoverflow)

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