JPS62186352U - - Google Patents

Info

Publication number
JPS62186352U
JPS62186352U JP7268486U JP7268486U JPS62186352U JP S62186352 U JPS62186352 U JP S62186352U JP 7268486 U JP7268486 U JP 7268486U JP 7268486 U JP7268486 U JP 7268486U JP S62186352 U JPS62186352 U JP S62186352U
Authority
JP
Japan
Prior art keywords
source
ion
utility
model registration
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7268486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7268486U priority Critical patent/JPS62186352U/ja
Publication of JPS62186352U publication Critical patent/JPS62186352U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7268486U 1986-05-16 1986-05-16 Pending JPS62186352U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7268486U JPS62186352U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7268486U JPS62186352U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62186352U true JPS62186352U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30916353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7268486U Pending JPS62186352U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62186352U (enrdf_load_stackoverflow)

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