JPS62186351U - - Google Patents

Info

Publication number
JPS62186351U
JPS62186351U JP7268386U JP7268386U JPS62186351U JP S62186351 U JPS62186351 U JP S62186351U JP 7268386 U JP7268386 U JP 7268386U JP 7268386 U JP7268386 U JP 7268386U JP S62186351 U JPS62186351 U JP S62186351U
Authority
JP
Japan
Prior art keywords
source
ion
magnet magnetic
ion implantation
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7268386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7268386U priority Critical patent/JPS62186351U/ja
Publication of JPS62186351U publication Critical patent/JPS62186351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7268386U 1986-05-16 1986-05-16 Pending JPS62186351U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7268386U JPS62186351U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7268386U JPS62186351U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62186351U true JPS62186351U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30916351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7268386U Pending JPS62186351U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62186351U (enrdf_load_stackoverflow)

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