JPS62186356U - - Google Patents

Info

Publication number
JPS62186356U
JPS62186356U JP7268886U JP7268886U JPS62186356U JP S62186356 U JPS62186356 U JP S62186356U JP 7268886 U JP7268886 U JP 7268886U JP 7268886 U JP7268886 U JP 7268886U JP S62186356 U JPS62186356 U JP S62186356U
Authority
JP
Japan
Prior art keywords
filament
arc chamber
ion source
reel
thermionic electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7268886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7268886U priority Critical patent/JPS62186356U/ja
Publication of JPS62186356U publication Critical patent/JPS62186356U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7268886U 1986-05-16 1986-05-16 Pending JPS62186356U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7268886U JPS62186356U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7268886U JPS62186356U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62186356U true JPS62186356U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30916361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7268886U Pending JPS62186356U (enrdf_load_stackoverflow) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62186356U (enrdf_load_stackoverflow)

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