JPH0291144U - - Google Patents

Info

Publication number
JPH0291144U
JPH0291144U JP17111088U JP17111088U JPH0291144U JP H0291144 U JPH0291144 U JP H0291144U JP 17111088 U JP17111088 U JP 17111088U JP 17111088 U JP17111088 U JP 17111088U JP H0291144 U JPH0291144 U JP H0291144U
Authority
JP
Japan
Prior art keywords
crucible
magnetic field
filament
evaporation source
source device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17111088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538049Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17111088U priority Critical patent/JPH0538049Y2/ja
Publication of JPH0291144U publication Critical patent/JPH0291144U/ja
Application granted granted Critical
Publication of JPH0538049Y2 publication Critical patent/JPH0538049Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17111088U 1988-12-30 1988-12-30 Expired - Lifetime JPH0538049Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17111088U JPH0538049Y2 (enrdf_load_stackoverflow) 1988-12-30 1988-12-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17111088U JPH0538049Y2 (enrdf_load_stackoverflow) 1988-12-30 1988-12-30

Publications (2)

Publication Number Publication Date
JPH0291144U true JPH0291144U (enrdf_load_stackoverflow) 1990-07-19
JPH0538049Y2 JPH0538049Y2 (enrdf_load_stackoverflow) 1993-09-27

Family

ID=31462649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17111088U Expired - Lifetime JPH0538049Y2 (enrdf_load_stackoverflow) 1988-12-30 1988-12-30

Country Status (1)

Country Link
JP (1) JPH0538049Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0538049Y2 (enrdf_load_stackoverflow) 1993-09-27

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