JPS63139753U - - Google Patents

Info

Publication number
JPS63139753U
JPS63139753U JP3192087U JP3192087U JPS63139753U JP S63139753 U JPS63139753 U JP S63139753U JP 3192087 U JP3192087 U JP 3192087U JP 3192087 U JP3192087 U JP 3192087U JP S63139753 U JPS63139753 U JP S63139753U
Authority
JP
Japan
Prior art keywords
heat source
ion implantation
arc chamber
tungsten
tungsten heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3192087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3192087U priority Critical patent/JPS63139753U/ja
Publication of JPS63139753U publication Critical patent/JPS63139753U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3192087U 1987-03-06 1987-03-06 Pending JPS63139753U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3192087U JPS63139753U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3192087U JPS63139753U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Publications (1)

Publication Number Publication Date
JPS63139753U true JPS63139753U (enrdf_load_stackoverflow) 1988-09-14

Family

ID=30838101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3192087U Pending JPS63139753U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPS63139753U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6129057A (ja) * 1984-07-20 1986-02-08 Nec Corp イオン注入装置
JPS6220227A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd イオン源

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6129057A (ja) * 1984-07-20 1986-02-08 Nec Corp イオン注入装置
JPS6220227A (ja) * 1985-07-19 1987-01-28 Hitachi Ltd イオン源

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