JPS6381859U - - Google Patents

Info

Publication number
JPS6381859U
JPS6381859U JP17444786U JP17444786U JPS6381859U JP S6381859 U JPS6381859 U JP S6381859U JP 17444786 U JP17444786 U JP 17444786U JP 17444786 U JP17444786 U JP 17444786U JP S6381859 U JPS6381859 U JP S6381859U
Authority
JP
Japan
Prior art keywords
container
rotary cage
workpiece
heater coil
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17444786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17444786U priority Critical patent/JPS6381859U/ja
Publication of JPS6381859U publication Critical patent/JPS6381859U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17444786U 1986-11-13 1986-11-13 Pending JPS6381859U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17444786U JPS6381859U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17444786U JPS6381859U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6381859U true JPS6381859U (enrdf_load_stackoverflow) 1988-05-30

Family

ID=31112839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17444786U Pending JPS6381859U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6381859U (enrdf_load_stackoverflow)

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