JPS61120757U - - Google Patents

Info

Publication number
JPS61120757U
JPS61120757U JP346885U JP346885U JPS61120757U JP S61120757 U JPS61120757 U JP S61120757U JP 346885 U JP346885 U JP 346885U JP 346885 U JP346885 U JP 346885U JP S61120757 U JPS61120757 U JP S61120757U
Authority
JP
Japan
Prior art keywords
ion
evaporation
wafer
disk
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP346885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP346885U priority Critical patent/JPS61120757U/ja
Publication of JPS61120757U publication Critical patent/JPS61120757U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP346885U 1985-01-14 1985-01-14 Pending JPS61120757U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP346885U JPS61120757U (enrdf_load_stackoverflow) 1985-01-14 1985-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP346885U JPS61120757U (enrdf_load_stackoverflow) 1985-01-14 1985-01-14

Publications (1)

Publication Number Publication Date
JPS61120757U true JPS61120757U (enrdf_load_stackoverflow) 1986-07-30

Family

ID=30478124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP346885U Pending JPS61120757U (enrdf_load_stackoverflow) 1985-01-14 1985-01-14

Country Status (1)

Country Link
JP (1) JPS61120757U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005066385A1 (ja) * 2004-01-06 2005-07-21 Ideal Star Inc. イオン注入方法、及び、イオン注入装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005066385A1 (ja) * 2004-01-06 2005-07-21 Ideal Star Inc. イオン注入方法、及び、イオン注入装置
JP4769083B2 (ja) * 2004-01-06 2011-09-07 株式会社イデアルスター イオン注入方法、及び、イオン注入装置

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