JPH0650979Y2 - 成膜装置用基板保持機構 - Google Patents

成膜装置用基板保持機構

Info

Publication number
JPH0650979Y2
JPH0650979Y2 JP1988056143U JP5614388U JPH0650979Y2 JP H0650979 Y2 JPH0650979 Y2 JP H0650979Y2 JP 1988056143 U JP1988056143 U JP 1988056143U JP 5614388 U JP5614388 U JP 5614388U JP H0650979 Y2 JPH0650979 Y2 JP H0650979Y2
Authority
JP
Japan
Prior art keywords
substrate
film forming
holder
substrate holder
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988056143U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01162232U (en:Method
Inventor
正義 今村
吉次 大畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988056143U priority Critical patent/JPH0650979Y2/ja
Publication of JPH01162232U publication Critical patent/JPH01162232U/ja
Application granted granted Critical
Publication of JPH0650979Y2 publication Critical patent/JPH0650979Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1988056143U 1988-04-26 1988-04-26 成膜装置用基板保持機構 Expired - Lifetime JPH0650979Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988056143U JPH0650979Y2 (ja) 1988-04-26 1988-04-26 成膜装置用基板保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988056143U JPH0650979Y2 (ja) 1988-04-26 1988-04-26 成膜装置用基板保持機構

Publications (2)

Publication Number Publication Date
JPH01162232U JPH01162232U (en:Method) 1989-11-10
JPH0650979Y2 true JPH0650979Y2 (ja) 1994-12-21

Family

ID=31282025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988056143U Expired - Lifetime JPH0650979Y2 (ja) 1988-04-26 1988-04-26 成膜装置用基板保持機構

Country Status (1)

Country Link
JP (1) JPH0650979Y2 (en:Method)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100943A (ja) * 1984-10-24 1986-05-19 Hitachi Ltd 真空処理装置
JPS61159135U (en:Method) * 1985-03-27 1986-10-02

Also Published As

Publication number Publication date
JPH01162232U (en:Method) 1989-11-10

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