JPH0650538Y2 - 基板加熱装置 - Google Patents

基板加熱装置

Info

Publication number
JPH0650538Y2
JPH0650538Y2 JP1989000037U JP3789U JPH0650538Y2 JP H0650538 Y2 JPH0650538 Y2 JP H0650538Y2 JP 1989000037 U JP1989000037 U JP 1989000037U JP 3789 U JP3789 U JP 3789U JP H0650538 Y2 JPH0650538 Y2 JP H0650538Y2
Authority
JP
Japan
Prior art keywords
substrate
heating
substrate mounting
heat stage
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989000037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0294251U (enrdf_load_stackoverflow
Inventor
竜治 岩間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1989000037U priority Critical patent/JPH0650538Y2/ja
Publication of JPH0294251U publication Critical patent/JPH0294251U/ja
Application granted granted Critical
Publication of JPH0650538Y2 publication Critical patent/JPH0650538Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1989000037U 1989-01-05 1989-01-05 基板加熱装置 Expired - Lifetime JPH0650538Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000037U JPH0650538Y2 (ja) 1989-01-05 1989-01-05 基板加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000037U JPH0650538Y2 (ja) 1989-01-05 1989-01-05 基板加熱装置

Publications (2)

Publication Number Publication Date
JPH0294251U JPH0294251U (enrdf_load_stackoverflow) 1990-07-26
JPH0650538Y2 true JPH0650538Y2 (ja) 1994-12-21

Family

ID=31198705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000037U Expired - Lifetime JPH0650538Y2 (ja) 1989-01-05 1989-01-05 基板加熱装置

Country Status (1)

Country Link
JP (1) JPH0650538Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179769A (ja) * 1984-09-28 1986-04-23 Nec Corp ウエハ温度制御装置
JPS63274768A (ja) * 1987-05-06 1988-11-11 Tokuda Seisakusho Ltd 真空処理装置

Also Published As

Publication number Publication date
JPH0294251U (enrdf_load_stackoverflow) 1990-07-26

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