JPH0648838Y2 - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPH0648838Y2 JPH0648838Y2 JP19474786U JP19474786U JPH0648838Y2 JP H0648838 Y2 JPH0648838 Y2 JP H0648838Y2 JP 19474786 U JP19474786 U JP 19474786U JP 19474786 U JP19474786 U JP 19474786U JP H0648838 Y2 JPH0648838 Y2 JP H0648838Y2
- Authority
- JP
- Japan
- Prior art keywords
- diffusion region
- diode
- recess
- schottky
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 14
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 14
- 230000005669 field effect Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- -1 silicon ion Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19474786U JPH0648838Y2 (ja) | 1986-12-18 | 1986-12-18 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19474786U JPH0648838Y2 (ja) | 1986-12-18 | 1986-12-18 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6398663U JPS6398663U (enrdf_load_stackoverflow) | 1988-06-25 |
| JPH0648838Y2 true JPH0648838Y2 (ja) | 1994-12-12 |
Family
ID=31152004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19474786U Expired - Lifetime JPH0648838Y2 (ja) | 1986-12-18 | 1986-12-18 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648838Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-12-18 JP JP19474786U patent/JPH0648838Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6398663U (enrdf_load_stackoverflow) | 1988-06-25 |
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