JPH0648832Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0648832Y2
JPH0648832Y2 JP1988105702U JP10570288U JPH0648832Y2 JP H0648832 Y2 JPH0648832 Y2 JP H0648832Y2 JP 1988105702 U JP1988105702 U JP 1988105702U JP 10570288 U JP10570288 U JP 10570288U JP H0648832 Y2 JPH0648832 Y2 JP H0648832Y2
Authority
JP
Japan
Prior art keywords
electromagnetic coil
case
generation chamber
plasma generation
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988105702U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227726U (OSRAM
Inventor
道夫 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP1988105702U priority Critical patent/JPH0648832Y2/ja
Publication of JPH0227726U publication Critical patent/JPH0227726U/ja
Application granted granted Critical
Publication of JPH0648832Y2 publication Critical patent/JPH0648832Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1988105702U 1988-08-09 1988-08-09 プラズマ処理装置 Expired - Lifetime JPH0648832Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988105702U JPH0648832Y2 (ja) 1988-08-09 1988-08-09 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988105702U JPH0648832Y2 (ja) 1988-08-09 1988-08-09 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH0227726U JPH0227726U (OSRAM) 1990-02-22
JPH0648832Y2 true JPH0648832Y2 (ja) 1994-12-12

Family

ID=31338555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988105702U Expired - Lifetime JPH0648832Y2 (ja) 1988-08-09 1988-08-09 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0648832Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666296B2 (ja) * 1985-09-20 1994-08-24 株式会社日立製作所 プラズマ処理装置
JPS62197847U (OSRAM) * 1986-06-06 1987-12-16

Also Published As

Publication number Publication date
JPH0227726U (OSRAM) 1990-02-22

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