JPH06460Y2 - シリンダ型気相成長装置 - Google Patents

シリンダ型気相成長装置

Info

Publication number
JPH06460Y2
JPH06460Y2 JP14680988U JP14680988U JPH06460Y2 JP H06460 Y2 JPH06460 Y2 JP H06460Y2 JP 14680988 U JP14680988 U JP 14680988U JP 14680988 U JP14680988 U JP 14680988U JP H06460 Y2 JPH06460 Y2 JP H06460Y2
Authority
JP
Japan
Prior art keywords
gas supply
gas
reaction tube
baffle
cylinder type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14680988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0266682U (pl
Inventor
寛 伊賀
伸夫 柏木
芳洋 宮之前
毅彦 小林
幸一 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP14680988U priority Critical patent/JPH06460Y2/ja
Publication of JPH0266682U publication Critical patent/JPH0266682U/ja
Application granted granted Critical
Publication of JPH06460Y2 publication Critical patent/JPH06460Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14680988U 1988-11-10 1988-11-10 シリンダ型気相成長装置 Expired - Lifetime JPH06460Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14680988U JPH06460Y2 (ja) 1988-11-10 1988-11-10 シリンダ型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14680988U JPH06460Y2 (ja) 1988-11-10 1988-11-10 シリンダ型気相成長装置

Publications (2)

Publication Number Publication Date
JPH0266682U JPH0266682U (pl) 1990-05-21
JPH06460Y2 true JPH06460Y2 (ja) 1994-01-05

Family

ID=31416642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14680988U Expired - Lifetime JPH06460Y2 (ja) 1988-11-10 1988-11-10 シリンダ型気相成長装置

Country Status (1)

Country Link
JP (1) JPH06460Y2 (pl)

Also Published As

Publication number Publication date
JPH0266682U (pl) 1990-05-21

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