JPH0645965Y2 - ペリクル用容器 - Google Patents
ペリクル用容器Info
- Publication number
- JPH0645965Y2 JPH0645965Y2 JP1988016037U JP1603788U JPH0645965Y2 JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2 JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- container
- lid
- container body
- inner bottom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01120148U JPH01120148U (US20110009641A1-20110113-C00256.png) | 1989-08-15 |
JPH0645965Y2 true JPH0645965Y2 (ja) | 1994-11-24 |
Family
ID=31228617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988016037U Expired - Lifetime JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0645965Y2 (US20110009641A1-20110113-C00256.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007328226A (ja) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0123138Y2 (US20110009641A1-20110113-C00256.png) * | 1985-09-04 | 1989-07-17 | ||
JPS62143948U (US20110009641A1-20110113-C00256.png) * | 1986-03-07 | 1987-09-10 | ||
US4697701A (en) * | 1986-05-30 | 1987-10-06 | Inko Industrial Corporation | Dust free storage container for a membrane assembly such as a pellicle and its method of use |
JPS63140526U (US20110009641A1-20110113-C00256.png) * | 1987-03-06 | 1988-09-16 |
-
1988
- 1988-02-09 JP JP1988016037U patent/JPH0645965Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01120148U (US20110009641A1-20110113-C00256.png) | 1989-08-15 |
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