JPH064586Y2 - ウエハー移し替え装置 - Google Patents

ウエハー移し替え装置

Info

Publication number
JPH064586Y2
JPH064586Y2 JP1986199481U JP19948186U JPH064586Y2 JP H064586 Y2 JPH064586 Y2 JP H064586Y2 JP 1986199481 U JP1986199481 U JP 1986199481U JP 19948186 U JP19948186 U JP 19948186U JP H064586 Y2 JPH064586 Y2 JP H064586Y2
Authority
JP
Japan
Prior art keywords
stage
wafers
wafer
pitch
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986199481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63106141U (enExample
Inventor
浩 徳永
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1986199481U priority Critical patent/JPH064586Y2/ja
Publication of JPS63106141U publication Critical patent/JPS63106141U/ja
Application granted granted Critical
Publication of JPH064586Y2 publication Critical patent/JPH064586Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP1986199481U 1986-12-26 1986-12-26 ウエハー移し替え装置 Expired - Lifetime JPH064586Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986199481U JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986199481U JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Publications (2)

Publication Number Publication Date
JPS63106141U JPS63106141U (enExample) 1988-07-08
JPH064586Y2 true JPH064586Y2 (ja) 1994-02-02

Family

ID=31161146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986199481U Expired - Lifetime JPH064586Y2 (ja) 1986-12-26 1986-12-26 ウエハー移し替え装置

Country Status (1)

Country Link
JP (1) JPH064586Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7783021B2 (ja) * 2021-11-16 2025-12-09 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック 基板移載装置

Also Published As

Publication number Publication date
JPS63106141U (enExample) 1988-07-08

Similar Documents

Publication Publication Date Title
US4457661A (en) Wafer loading apparatus
KR0146270B1 (ko) 웨이퍼 정렬장치
JPH0355983B2 (enExample)
JPS63211645A (ja) ウエハーを装着及び離脱する方法及び装置
JPH09289241A (ja) ウェーハ搬送装置
US4685852A (en) Process apparatus and method and elevator mechanism for use in connection therewith
US20020192059A1 (en) Methods and apparatus for transferring electrical components
JPH0964148A (ja) ウェーハリングの供給・返送装置
CN1193919C (zh) 模块集成电路处理机的运载装卸装置
CN218193116U (zh) 激光加工设备
CN215247843U (zh) 全自动集中转印生产线
JPH0798588B2 (ja) リ−ドフレ−ム分離装置
JP2945837B2 (ja) 板状体の搬送機構および搬送方法
JPH041150Y2 (enExample)
CN119381313B (zh) 一种芯片基板装载机构及半导体封装设备
CN224265429U (zh) 一种用于晶圆的分离挑片装置及系统
JP2543741B2 (ja) マガジン移送装置
CN218867064U (zh) 一种用于晶圆存取的存片机
CN223779399U (zh) 一种竖向取放产品机构
CN119542215B (zh) 一种晶圆搬运装置及方法
JPH0220834Y2 (enExample)
JP2657187B2 (ja) 並べ換え方法及び並べ換え装置
JP2550553Y2 (ja) 表面処理装置のウエハ移替装置
JP2849890B2 (ja) 基板処理装置及びその制御方法
JPH088317A (ja) 半導体装置の移載装置