JPH06451Y2 - グロ−放電分解装置 - Google Patents

グロ−放電分解装置

Info

Publication number
JPH06451Y2
JPH06451Y2 JP11749287U JP11749287U JPH06451Y2 JP H06451 Y2 JPH06451 Y2 JP H06451Y2 JP 11749287 U JP11749287 U JP 11749287U JP 11749287 U JP11749287 U JP 11749287U JP H06451 Y2 JPH06451 Y2 JP H06451Y2
Authority
JP
Japan
Prior art keywords
substrate
glow discharge
mask body
film
discharge decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11749287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6422771U (fi
Inventor
茂樹 白松
雄二 吉田
鴻吉 石櫃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP11749287U priority Critical patent/JPH06451Y2/ja
Publication of JPS6422771U publication Critical patent/JPS6422771U/ja
Application granted granted Critical
Publication of JPH06451Y2 publication Critical patent/JPH06451Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP11749287U 1987-07-30 1987-07-30 グロ−放電分解装置 Expired - Lifetime JPH06451Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11749287U JPH06451Y2 (ja) 1987-07-30 1987-07-30 グロ−放電分解装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11749287U JPH06451Y2 (ja) 1987-07-30 1987-07-30 グロ−放電分解装置

Publications (2)

Publication Number Publication Date
JPS6422771U JPS6422771U (fi) 1989-02-06
JPH06451Y2 true JPH06451Y2 (ja) 1994-01-05

Family

ID=31360997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11749287U Expired - Lifetime JPH06451Y2 (ja) 1987-07-30 1987-07-30 グロ−放電分解装置

Country Status (1)

Country Link
JP (1) JPH06451Y2 (fi)

Also Published As

Publication number Publication date
JPS6422771U (fi) 1989-02-06

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