JPH06449Y2 - 真空蒸着めつき装置の蒸発槽 - Google Patents

真空蒸着めつき装置の蒸発槽

Info

Publication number
JPH06449Y2
JPH06449Y2 JP1987037192U JP3719287U JPH06449Y2 JP H06449 Y2 JPH06449 Y2 JP H06449Y2 JP 1987037192 U JP1987037192 U JP 1987037192U JP 3719287 U JP3719287 U JP 3719287U JP H06449 Y2 JPH06449 Y2 JP H06449Y2
Authority
JP
Japan
Prior art keywords
evaporation tank
plating
evaporation
tank
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987037192U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63145856U (enExample
Inventor
康二 中西
憲夫 築地
琢哉 愛甲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP1987037192U priority Critical patent/JPH06449Y2/ja
Publication of JPS63145856U publication Critical patent/JPS63145856U/ja
Application granted granted Critical
Publication of JPH06449Y2 publication Critical patent/JPH06449Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987037192U 1987-03-16 1987-03-16 真空蒸着めつき装置の蒸発槽 Expired - Lifetime JPH06449Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987037192U JPH06449Y2 (ja) 1987-03-16 1987-03-16 真空蒸着めつき装置の蒸発槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987037192U JPH06449Y2 (ja) 1987-03-16 1987-03-16 真空蒸着めつき装置の蒸発槽

Publications (2)

Publication Number Publication Date
JPS63145856U JPS63145856U (enExample) 1988-09-27
JPH06449Y2 true JPH06449Y2 (ja) 1994-01-05

Family

ID=30848301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987037192U Expired - Lifetime JPH06449Y2 (ja) 1987-03-16 1987-03-16 真空蒸着めつき装置の蒸発槽

Country Status (1)

Country Link
JP (1) JPH06449Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035925A1 (en) * 2001-10-26 2003-05-01 Matsushita Electric Works, Ltd. Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD206499A3 (de) * 1981-07-14 1984-01-25 Guenter Jaesch Zinkverdampfer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035925A1 (en) * 2001-10-26 2003-05-01 Matsushita Electric Works, Ltd. Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method

Also Published As

Publication number Publication date
JPS63145856U (enExample) 1988-09-27

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