JPH0644873Y2 - ワーク収納カセット - Google Patents
ワーク収納カセットInfo
- Publication number
- JPH0644873Y2 JPH0644873Y2 JP11529489U JP11529489U JPH0644873Y2 JP H0644873 Y2 JPH0644873 Y2 JP H0644873Y2 JP 11529489 U JP11529489 U JP 11529489U JP 11529489 U JP11529489 U JP 11529489U JP H0644873 Y2 JPH0644873 Y2 JP H0644873Y2
- Authority
- JP
- Japan
- Prior art keywords
- work
- pair
- cassette
- lateral grooves
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003860 storage Methods 0.000 title claims description 7
- 238000003825 pressing Methods 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 5
- 239000000428 dust Substances 0.000 description 5
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11529489U JPH0644873Y2 (ja) | 1989-09-30 | 1989-09-30 | ワーク収納カセット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11529489U JPH0644873Y2 (ja) | 1989-09-30 | 1989-09-30 | ワーク収納カセット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0353487U JPH0353487U (enrdf_load_html_response) | 1991-05-23 |
JPH0644873Y2 true JPH0644873Y2 (ja) | 1994-11-16 |
Family
ID=31663626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11529489U Expired - Lifetime JPH0644873Y2 (ja) | 1989-09-30 | 1989-09-30 | ワーク収納カセット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644873Y2 (enrdf_load_html_response) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009010119A (ja) * | 2007-06-27 | 2009-01-15 | Elpida Memory Inc | 基板収容容器 |
JP5169738B2 (ja) * | 2008-10-29 | 2013-03-27 | 凸版印刷株式会社 | 基板用カセット |
JP5982128B2 (ja) * | 2012-02-06 | 2016-08-31 | 株式会社ディスコ | 収容カセット |
JP5993592B2 (ja) * | 2012-03-21 | 2016-09-14 | 株式会社ディスコ | カセット |
US12165905B2 (en) * | 2019-05-20 | 2024-12-10 | Applied Materials, Inc. | Process kit enclosure system |
-
1989
- 1989-09-30 JP JP11529489U patent/JPH0644873Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0353487U (enrdf_load_html_response) | 1991-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0644873Y2 (ja) | ワーク収納カセット | |
JP2001298079A (ja) | ウェーハ輸送容器のサポート具 | |
JP2009010119A (ja) | 基板収容容器 | |
JP2005035672A (ja) | ベアチップトレイクリップ | |
US20020148753A1 (en) | Tray used for holding hard disk drive heads | |
US12234081B2 (en) | Cell box and cell box device | |
JPS61203383A (ja) | 基板保持構造 | |
JP5993592B2 (ja) | カセット | |
JPH0853187A (ja) | 板状物品収納用キャリア | |
JP6112996B2 (ja) | トレイキャリア | |
JPH04267356A (ja) | 半導体素子搬送容器 | |
GB2116020A (en) | Storage rack | |
JPH05112378A (ja) | 半導体基板収納箱 | |
JP6621246B2 (ja) | トレイ保持装置 | |
JPH1056056A (ja) | ウェハカセットおよびウェハ挿抜システム | |
JPH078069Y2 (ja) | チップ洗浄用トレィセット | |
JP2513160Y2 (ja) | 半導体ウエハ―移載装置 | |
WO2000005152A1 (fr) | Plateau de tetes de lecteurs de disque dur | |
JP2504286B2 (ja) | 電子部品チップ収納カセット | |
JPH07221169A (ja) | 基板収納用カセット | |
JPH062273Y2 (ja) | 板状体の収納カセット | |
JP2021086913A (ja) | カセット | |
JP2002302191A (ja) | 板材収納枠 | |
KR200187047Y1 (ko) | 매스크 보관케이스의 매스크 유동방지구조 | |
JPS6024537Y2 (ja) | 鉄心用鉄板扱い工具 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |