JPH0644873Y2 - ワーク収納カセット - Google Patents

ワーク収納カセット

Info

Publication number
JPH0644873Y2
JPH0644873Y2 JP11529489U JP11529489U JPH0644873Y2 JP H0644873 Y2 JPH0644873 Y2 JP H0644873Y2 JP 11529489 U JP11529489 U JP 11529489U JP 11529489 U JP11529489 U JP 11529489U JP H0644873 Y2 JPH0644873 Y2 JP H0644873Y2
Authority
JP
Japan
Prior art keywords
work
pair
cassette
lateral grooves
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11529489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353487U (enrdf_load_html_response
Inventor
大亥 桶谷
郁夫 迫野
俊彦 広部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP11529489U priority Critical patent/JPH0644873Y2/ja
Publication of JPH0353487U publication Critical patent/JPH0353487U/ja
Application granted granted Critical
Publication of JPH0644873Y2 publication Critical patent/JPH0644873Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Packaging Frangible Articles (AREA)
JP11529489U 1989-09-30 1989-09-30 ワーク収納カセット Expired - Lifetime JPH0644873Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11529489U JPH0644873Y2 (ja) 1989-09-30 1989-09-30 ワーク収納カセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11529489U JPH0644873Y2 (ja) 1989-09-30 1989-09-30 ワーク収納カセット

Publications (2)

Publication Number Publication Date
JPH0353487U JPH0353487U (enrdf_load_html_response) 1991-05-23
JPH0644873Y2 true JPH0644873Y2 (ja) 1994-11-16

Family

ID=31663626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11529489U Expired - Lifetime JPH0644873Y2 (ja) 1989-09-30 1989-09-30 ワーク収納カセット

Country Status (1)

Country Link
JP (1) JPH0644873Y2 (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009010119A (ja) * 2007-06-27 2009-01-15 Elpida Memory Inc 基板収容容器
JP5169738B2 (ja) * 2008-10-29 2013-03-27 凸版印刷株式会社 基板用カセット
JP5982128B2 (ja) * 2012-02-06 2016-08-31 株式会社ディスコ 収容カセット
JP5993592B2 (ja) * 2012-03-21 2016-09-14 株式会社ディスコ カセット
US12165905B2 (en) * 2019-05-20 2024-12-10 Applied Materials, Inc. Process kit enclosure system

Also Published As

Publication number Publication date
JPH0353487U (enrdf_load_html_response) 1991-05-23

Similar Documents

Publication Publication Date Title
JPH0644873Y2 (ja) ワーク収納カセット
JP2001298079A (ja) ウェーハ輸送容器のサポート具
JP2009010119A (ja) 基板収容容器
JP2005035672A (ja) ベアチップトレイクリップ
US20020148753A1 (en) Tray used for holding hard disk drive heads
US12234081B2 (en) Cell box and cell box device
JPS61203383A (ja) 基板保持構造
JP5993592B2 (ja) カセット
JPH0853187A (ja) 板状物品収納用キャリア
JP6112996B2 (ja) トレイキャリア
JPH04267356A (ja) 半導体素子搬送容器
GB2116020A (en) Storage rack
JPH05112378A (ja) 半導体基板収納箱
JP6621246B2 (ja) トレイ保持装置
JPH1056056A (ja) ウェハカセットおよびウェハ挿抜システム
JPH078069Y2 (ja) チップ洗浄用トレィセット
JP2513160Y2 (ja) 半導体ウエハ―移載装置
WO2000005152A1 (fr) Plateau de tetes de lecteurs de disque dur
JP2504286B2 (ja) 電子部品チップ収納カセット
JPH07221169A (ja) 基板収納用カセット
JPH062273Y2 (ja) 板状体の収納カセット
JP2021086913A (ja) カセット
JP2002302191A (ja) 板材収納枠
KR200187047Y1 (ko) 매스크 보관케이스의 매스크 유동방지구조
JPS6024537Y2 (ja) 鉄心用鉄板扱い工具

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term