JPH0644091Y2 - レジスト膜形成装置のウェーハ搬送機構 - Google Patents

レジスト膜形成装置のウェーハ搬送機構

Info

Publication number
JPH0644091Y2
JPH0644091Y2 JP1203689U JP1203689U JPH0644091Y2 JP H0644091 Y2 JPH0644091 Y2 JP H0644091Y2 JP 1203689 U JP1203689 U JP 1203689U JP 1203689 U JP1203689 U JP 1203689U JP H0644091 Y2 JPH0644091 Y2 JP H0644091Y2
Authority
JP
Japan
Prior art keywords
wafer
rail
resist
transfer mechanism
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1203689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02102721U (enrdf_load_stackoverflow
Inventor
正彦 田中
剛史 佐藤
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP1203689U priority Critical patent/JPH0644091Y2/ja
Publication of JPH02102721U publication Critical patent/JPH02102721U/ja
Application granted granted Critical
Publication of JPH0644091Y2 publication Critical patent/JPH0644091Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1203689U 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構 Expired - Lifetime JPH0644091Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1203689U JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1203689U JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Publications (2)

Publication Number Publication Date
JPH02102721U JPH02102721U (enrdf_load_stackoverflow) 1990-08-15
JPH0644091Y2 true JPH0644091Y2 (ja) 1994-11-14

Family

ID=31221118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1203689U Expired - Lifetime JPH0644091Y2 (ja) 1989-02-02 1989-02-02 レジスト膜形成装置のウェーハ搬送機構

Country Status (1)

Country Link
JP (1) JPH0644091Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02102721U (enrdf_load_stackoverflow) 1990-08-15

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