JPS632142B2 - - Google Patents

Info

Publication number
JPS632142B2
JPS632142B2 JP57000737A JP73782A JPS632142B2 JP S632142 B2 JPS632142 B2 JP S632142B2 JP 57000737 A JP57000737 A JP 57000737A JP 73782 A JP73782 A JP 73782A JP S632142 B2 JPS632142 B2 JP S632142B2
Authority
JP
Japan
Prior art keywords
substrate
spindle chuck
side carrier
supply side
fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57000737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58118125A (ja
Inventor
Michio Hashimoto
Fumio Sakitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tatsumo KK
Original Assignee
Tatsumo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tatsumo KK filed Critical Tatsumo KK
Priority to JP57000737A priority Critical patent/JPS58118125A/ja
Publication of JPS58118125A publication Critical patent/JPS58118125A/ja
Publication of JPS632142B2 publication Critical patent/JPS632142B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP57000737A 1982-01-05 1982-01-05 基板の搬送装置 Granted JPS58118125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57000737A JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57000737A JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Publications (2)

Publication Number Publication Date
JPS58118125A JPS58118125A (ja) 1983-07-14
JPS632142B2 true JPS632142B2 (enrdf_load_stackoverflow) 1988-01-18

Family

ID=11482031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57000737A Granted JPS58118125A (ja) 1982-01-05 1982-01-05 基板の搬送装置

Country Status (1)

Country Link
JP (1) JPS58118125A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230001391A (ko) * 2021-06-28 2023-01-04 오석환 전기전도성이 향상된 버스바의 결합 구조체, 결합 방법 및 이를 이용한 배전반

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098638A (ja) * 1983-11-02 1985-06-01 Seiei Kosan Kk 乾板等移送装置
JPH0526754Y2 (enrdf_load_stackoverflow) * 1985-09-12 1993-07-07
JPH0526753Y2 (enrdf_load_stackoverflow) * 1985-09-12 1993-07-07
JP2535821B2 (ja) * 1986-02-21 1996-09-18 株式会社ニコン 基板の▲高▼速変換装置及び方法
JPH0638445B2 (ja) * 1987-02-27 1994-05-18 大日本スクリ−ン製造株式会社 基板移載装置
JPS63282022A (ja) * 1987-05-15 1988-11-18 Hitachi Electronics Eng Co Ltd ワ−ク搬送装置
JPS63178329U (enrdf_load_stackoverflow) * 1988-04-13 1988-11-18
JP2002261145A (ja) * 2001-03-02 2002-09-13 Kanayama Seiki Co Ltd ウェーハ取出・収納装置
JP6614965B2 (ja) * 2015-12-25 2019-12-04 ローランドディー．ジー．株式会社 インクジェットプリンタ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enrdf_load_stackoverflow) * 1974-06-25 1976-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230001391A (ko) * 2021-06-28 2023-01-04 오석환 전기전도성이 향상된 버스바의 결합 구조체, 결합 방법 및 이를 이용한 배전반

Also Published As

Publication number Publication date
JPS58118125A (ja) 1983-07-14

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