JPH064348Y2 - フォトマスク原板 - Google Patents
フォトマスク原板Info
- Publication number
- JPH064348Y2 JPH064348Y2 JP1988064337U JP6433788U JPH064348Y2 JP H064348 Y2 JPH064348 Y2 JP H064348Y2 JP 1988064337 U JP1988064337 U JP 1988064337U JP 6433788 U JP6433788 U JP 6433788U JP H064348 Y2 JPH064348 Y2 JP H064348Y2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- etching
- width
- shape
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 38
- 238000010586 diagram Methods 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988064337U JPH064348Y2 (ja) | 1988-05-16 | 1988-05-16 | フォトマスク原板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988064337U JPH064348Y2 (ja) | 1988-05-16 | 1988-05-16 | フォトマスク原板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01171454U JPH01171454U (en, 2012) | 1989-12-05 |
| JPH064348Y2 true JPH064348Y2 (ja) | 1994-02-02 |
Family
ID=31289807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988064337U Expired - Lifetime JPH064348Y2 (ja) | 1988-05-16 | 1988-05-16 | フォトマスク原板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064348Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5418559B2 (ja) * | 2011-08-31 | 2014-02-19 | 大日本印刷株式会社 | パターン位相差フィルムの製造方法及びマスク |
-
1988
- 1988-05-16 JP JP1988064337U patent/JPH064348Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01171454U (en, 2012) | 1989-12-05 |
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