JPH0641660A - Cu alloy steel having fine structure for electric and electronic parts - Google Patents
Cu alloy steel having fine structure for electric and electronic partsInfo
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- JPH0641660A JPH0641660A JP22085592A JP22085592A JPH0641660A JP H0641660 A JPH0641660 A JP H0641660A JP 22085592 A JP22085592 A JP 22085592A JP 22085592 A JP22085592 A JP 22085592A JP H0641660 A JPH0641660 A JP H0641660A
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Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、微細組織を有し、こ
の結果エッチング面の面粗さが著しく小さく、かつすぐ
れた曲げ加工性を示すようになる電気電子部品用Cu合
金板材に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Cu alloy plate material for electric and electronic parts which has a fine structure, resulting in a significantly small surface roughness on the etching surface and excellent bending workability. is there.
【0002】[0002]
【従来の技術】従来、半導体装置のリード材や、端子お
よびコネクターなどの各種電気電子部品の製造に、例え
ば特開昭63−86838号公報に記載されるような、
重量%で(以下、%は重量%を示す)、Ni:0.8〜
4%、 Si:0.1〜1.2%、Sn:1〜4%、
Mg:0.2%以下、を含有し、残りがCuと不可
避不純物からなる組成を有するCu合金板材はじめ、そ
の他多くのCu合金板材が用いられている。2. Description of the Related Art Conventionally, as described in, for example, Japanese Patent Laid-Open No. 63-86838, for manufacturing lead materials for semiconductor devices and various electric and electronic parts such as terminals and connectors,
In% by weight (hereinafter,% indicates% by weight), Ni: 0.8 to
4%, Si: 0.1 to 1.2%, Sn: 1 to 4%,
Many other Cu alloy sheet materials are used, including a Cu alloy sheet material containing Mg: 0.2% or less and the balance of Cu and inevitable impurities.
【0003】[0003]
【発明が解決しようとする課題】一方、近年の各種電気
電子部品の小型化および軽量化(薄肉化)、さらに高集
積化はめざましく、これに伴ないCu合金板材には、強
度のほかに、特に平滑な、すなわち面粗さの小さいエッ
チング面、および厳しい条件下での曲げ加工にも割れの
発生がない、すぐれた曲げ加工性が要求され、例えば半
導体装置のリードフレーム材に高集積度の回路パターン
をエッチングにて形成するに際しては、エッチング後の
表面が平滑であることが不可欠であるが、上記の従来C
u合金板材においては、溶体化処理および析出処理した
状態で、通常平均結晶粒径が50〜100μmにして、
主体がNi2 Siなどのニッケルけい化物からなる析出
物も、その径が5μmを越えるものが数多く存在するた
めに、これが原因でエッチング面の面粗さが荒れるよう
になるばかりでなく、曲げ加工に際して割れが発生し易
くなるという問題がある。On the other hand, in recent years, miniaturization and weight reduction (thinning) of various electric and electronic parts and further high integration have been remarkable, and accordingly, in addition to strength, Cu alloy plate materials have In particular, it is required to have a smooth etching surface, that is, an etched surface with a small surface roughness, and excellent bending workability without cracking during bending under severe conditions. When forming a circuit pattern by etching, it is essential that the surface after etching is smooth.
In the u alloy plate material, the average crystal grain size is usually set to 50 to 100 μm in the state of solution treatment and precipitation treatment,
There are many precipitates mainly composed of nickel silicide such as Ni 2 Si and having a diameter exceeding 5 μm, which not only causes the surface roughness of the etching surface to become rough, but also causes bending work. At that time, there is a problem that cracks easily occur.
【0004】[0004]
【課題を解決するための手段】そこで、本発明者等は、
微細組織のCu合金板材を開発すべく研究を行なった結
果、Ni:0.4〜5%、 Si:0.0
5〜1.2%、Sn:0.07〜2.5%、 M
g:0.001〜0.2%、Zn:0.1〜3%、
Fe:0.007〜0.25%、Mo:0.
0002〜0.03%、を含有し、残りがCuと不可避
不純物からなる組成を有するCu合金板材は、溶体化処
理とこれに引続いての析出処理(時効処理)を施した状
態で、平均粒径が30μm以下にして、析出物の最大径
が3μm以下である微細組織をもつようになり、このよ
うに微細組織のCu合金板材は、表面粗さ:1μm以下
の平滑なエッチング面を示すほか、すぐれた曲げ加工性
および高強度を具備し、さらにすぐれたはんだ耐熱剥離
性も有するようになるという研究結果を得たのである。Therefore, the present inventors have
As a result of conducting research to develop a Cu alloy plate material having a fine structure, Ni: 0.4 to 5%, Si: 0.0
5 to 1.2%, Sn: 0.07 to 2.5%, M
g: 0.001-0.2%, Zn: 0.1-3%,
Fe: 0.007 to 0.25%, Mo: 0.
A Cu alloy plate material containing 0002 to 0.03%, and the balance of which is composed of Cu and inevitable impurities, is an average in a state of being subjected to solution treatment and subsequent precipitation treatment (aging treatment). The Cu alloy plate material having a grain size of 30 μm or less and a maximum precipitate diameter of 3 μm or less has a fine structure, and thus the Cu alloy plate material having a fine structure exhibits a smooth etched surface with a surface roughness of 1 μm or less. In addition, they obtained the research results that they have excellent bending workability and high strength, and also have excellent solder heat resistance peeling property.
【0005】この発明は、上記の研究結果にもとづいて
なされたものであって、Ni:0.4〜5%、
Si:0.05〜1.2%、Sn:0.07〜
2.5%、 Mg:0.001〜0.2%、Z
n:0.1〜3%、 Fe:0.007〜
0.25%、Mo:0.0002〜0.03%、を含有
し、残りがCuと不可避不純物からなる組成、並びに平
均結晶粒径が30μm以下にして、析出物の最大径が3
μm以下である微細組織を有する、特にエッチング面が
平滑で、曲げ加工性にすぐれ、かつはんだ耐熱剥離性に
もすぐれた電気電子部品用Cu合金板材に特徴を有する
ものである。The present invention was made based on the above research results, and Ni: 0.4 to 5%,
Si: 0.05 to 1.2%, Sn: 0.07 to
2.5%, Mg: 0.001-0.2%, Z
n: 0.1 to 3%, Fe: 0.007 to
0.25%, Mo: 0.0002 to 0.03%, with the balance being Cu and unavoidable impurities, the average crystal grain size being 30 μm or less, and the maximum precipitate size being 3
It is characterized by a Cu alloy plate material for electric and electronic parts, which has a fine structure of not more than μm, particularly has a smooth etching surface, excellent bending workability, and excellent solder heat resistance peeling property.
【0006】つぎに、この発明のCu合金板材におい
て、その成分組成を上記の通りに限定した理由を説明す
る。 (a) NiおよびSi これらの成分には、析出処理後に素地に微細に分散析出
する、主体がNi2 Siからなる析出物を形成し、もっ
て導電性を大幅に低下させることなく強度を向上させる
作用があるが、その含有量が、それぞれNi:0.4%
未満およびSi:0.05%未満では所望の強度を確保
することができず、一方その含有量がNi:5%および
Si:1.2%を越えると、導電性およびはんだ耐熱剥
離性が低下するようになることから、その含有量をそれ
ぞれNi:0.4〜5%、Si:0.05〜1.2%と
定めた。Next, the reason why the composition of the Cu alloy sheet material of the present invention is limited as described above will be explained. (A) Ni and Si With these components, a precipitate mainly composed of Ni 2 Si which is finely dispersed and precipitated on the substrate after the precipitation treatment is formed, and thus the strength is improved without significantly decreasing the conductivity. There is a function, but the content is Ni: 0.4%
If the content is less than Si and less than 0.05%, the desired strength cannot be secured. On the other hand, if the content exceeds Ni: 5% and Si: 1.2%, the conductivity and the solder heat peeling property are deteriorated. As a result, the contents were determined to be Ni: 0.4 to 5% and Si: 0.05 to 1.2%, respectively.
【0007】(b) Sn Sn成分には、素地に固溶して強度を一段と向上させる
作用があるが、その含有量が0.07%未満では前記作
用に所望の効果が得られず、一方その含有量が2.5%
を越えると導電性が低下するようになることから、その
含有量を0.07〜2.5%と定めた。(B) Sn The Sn component has the action of forming a solid solution in the base material to further improve the strength, but if the content is less than 0.07%, the desired effect cannot be obtained for the action, while Its content is 2.5%
If it exceeds 1.0, the conductivity will decrease, so the content was set to 0.07 to 2.5%.
【0008】(c) Mg Mg成分には、熱間加工性を向上させる作用があるが、
その含有量が0.001%未満では所望の熱間加工性向
上効果が得られず、一方その含有量が0.2%を越える
と、鋳塊にMg酸化物などが巻き込まれ易くなり、これ
が原因で熱延性および表面清浄性が損なわれるようにな
ることから、その含有量を0.001〜0.2%と定め
た。(C) Mg The Mg component has the function of improving hot workability,
If the content is less than 0.001%, the desired hot workability-improving effect cannot be obtained, while if the content exceeds 0.2%, Mg oxide or the like tends to be caught in the ingot, which is Since the hot ductility and the surface cleanability are impaired due to the cause, the content thereof is set to 0.001 to 0.2%.
【0009】(d) Zn Zn成分には、素地に固溶して、はんだ耐熱剥離性を向
上させる作用があるが、その含有量が0.1%未満では
所望のはんだ耐熱剥離性を確保することができず、一方
その含有量が3%を越えてもより一層の向上効果は現わ
れないことから、その含有量を0.1〜3%と定めた。(D) Zn The Zn component has the function of forming a solid solution in the base material to improve the solder heat resistance peeling property, but if the content is less than 0.1%, the desired solder heat resistance peeling property is secured. However, even if the content exceeds 3%, no further improvement effect appears, so the content was set to 0.1 to 3%.
【0010】(e) FeおよびMo これらの成分には、溶体化処理の高温加熱に際しての結
晶粒の粗大化を抑制するほか、析出物の粗大化を阻止
し、もってエッチング後の表面粗さを1μm以下に平滑
化すると共に、厳しい曲げ加工にも割れの発生を抑制す
る作用があるが、その含有量が、それぞれFe:0.0
07%未満およびMo:0.0002%未満では前記作
用に所望の効果が得られず、一方その含有量がFe:
0.25%およびMo:0.03%を越えると熱間圧延
性および曲げ加工性が低下するようになることから、そ
の含有量をFe:0.007〜0.25%、Mo:0.
0002〜0.03%と定めた。(E) Fe and Mo These components suppress coarsening of crystal grains at the time of heating at high temperature during solution treatment, and prevent coarsening of precipitates, thereby improving surface roughness after etching. While smoothing to 1 μm or less, it has an effect of suppressing the occurrence of cracks even in severe bending, but the content of each is Fe: 0.0
If the content is less than 07% and Mo: less than 0.0002%, the desired effect cannot be obtained, while the content of Fe:
If it exceeds 0.25% and Mo: 0.03%, the hot rolling property and the bending workability are deteriorated, so the contents are Fe: 0.007 to 0.25%, Mo: 0.
It was defined as 0002 to 0.03%.
【0011】[0011]
【実施例】つぎに、この発明のCu合金板材を実施例に
より具体的に説明する。通常の低周波溝型溶解炉にて、
それぞれ表1〜3に示される成分組成をもったCu合金
溶湯を調製し、半連続鋳造法にて厚さ:160mm×幅:
450mm×長さ:1600mmの寸法をもった鋳塊とし、
この鋳塊に、750〜980℃の範囲内の所定の圧延開
始温度で熱間圧延を施して厚さ:11mmの熱延板とし、
この熱延板に、水冷後、上下両面を0.5mmづつ、両側
端部を3mmづつそれぞれ面削した状態で、圧延率:87
%の冷間圧延を施して厚さ:1.32mmの冷延板とし、
さらにこれに400〜650℃の範囲内の所定温度に1
時間保持の中間焼純を施した状態で、圧延率:75%の
冷間圧延を施して厚さ:0.33mmの冷延板とし、つい
でこれに750〜950℃の範囲内の所定温度に5〜3
00秒保持した後、750〜500℃の温度範囲を40
℃/sec 以上の冷却速度で冷却する溶体化処理を施し、
引続いて400〜500℃の範囲内の所定温度に3時間
保持の析出処理を施し、さらに圧延率:25%の冷間圧
延を行ない、最終的に250〜350℃の範囲内の所定
温度に1時間保持の歪取り焼鈍を施すことにより、同じ
く表1〜3にそれぞれ示される平均結晶粒径および析出
物最大径の本発明Cu合金板材1〜14、比較Cu合金
板材1〜9、および従来Cu合金板材1〜4をそれぞれ
製造した。EXAMPLES Next, the Cu alloy sheet material of the present invention will be specifically described by way of examples. In a normal low frequency groove type melting furnace,
Cu alloy melts each having the composition shown in Tables 1 to 3 were prepared, and the thickness was 160 mm × width: by the semi-continuous casting method.
450mm x length: 1600mm as an ingot,
This ingot is hot-rolled at a predetermined rolling start temperature within the range of 750 to 980 ° C. to obtain a hot-rolled sheet with a thickness of 11 mm,
After cooling with water, the hot-rolled sheet was chamfered by 0.5 mm on each of the upper and lower sides and 3 mm on each side, and the rolling ratio was 87.
% Cold-rolled into a cold-rolled sheet with a thickness of 1.32 mm,
In addition, 1 to a predetermined temperature in the range of 400 ~ 650 ℃
In the state where the intermediate refining for holding time is performed, cold rolling with a rolling ratio of 75% is performed to form a cold rolled sheet with a thickness of 0.33 mm, which is then brought to a predetermined temperature within the range of 750 to 950 ° C. 5-3
After holding for 00 seconds, the temperature range of 750 to 500 ° C is changed to 40
The solution treatment that cools at a cooling rate of ℃ / sec or more is applied,
Subsequently, a precipitation treatment of holding for 3 hours at a predetermined temperature in the range of 400 to 500 ° C. is performed, and further cold rolling at a rolling rate of 25% is performed, and finally to a predetermined temperature in the range of 250 to 350 ° C. By performing the strain relief annealing of holding for 1 hour, the Cu alloy sheet materials 1 to 14 of the present invention, the comparative Cu alloy sheet materials 1 to 9 having the average crystal grain size and the maximum precipitate diameter similarly shown in Tables 1 to 3 respectively, and the conventional one. Cu alloy plate materials 1 to 4 were manufactured.
【0012】なお、比較Cu合金板材1〜9は、Cu合
金の構成成分のうちのいずれかの成分含有量(*印を付
す)がこの発明範囲から外れたものである。また、平均
結晶粒径は光学顕微鏡を用いて測定し、さらに析出物に
ついては、走査型電子顕微鏡を用い、5000倍の倍率
にて任意10ヶ所を測定し、この測定箇所のうちで最大
径を示した析出物を示した。In the comparative Cu alloy sheet materials 1 to 9, the content of any one of the constituents of the Cu alloy (marked with *) is out of the range of the present invention. The average crystal grain size was measured using an optical microscope, and the precipitate was measured using a scanning electron microscope at 10 times at a magnification of 5000 times. The indicated precipitate was shown.
【0013】つぎに、この結果得られた各種のCu合金
板材について、JIS・Z2241に基づいての引張試
験にて引張強さと伸びを測定し、同じくJIS・H05
05に基づいて導電率を測定し、さらに曲げ加工試験お
よびはんだの熱剥離試験を行ない、エッチング面の表面
粗さも測定した。Next, with respect to various Cu alloy sheet materials obtained as a result, the tensile strength and elongation were measured by a tensile test based on JIS Z2241, and JIS H05 was also used.
The electrical conductivity was measured based on No. 05, a bending test and a solder thermal peeling test were performed, and the surface roughness of the etched surface was also measured.
【0014】曲げ加工試験は、JIS・Z2248のV
ブロック法に準じ、曲げ軸を圧延平行方向(bad way 方
向)にとり、試験片の表面に割れが発生する最小曲げ半
径:r(mm)を測定し、このrと試験片の厚さ:tとの
比:r/tで評価することにより行なった。The bending test is performed according to JIS Z2248 V
According to the block method, the bending axis is set in the rolling parallel direction (bad way direction), and the minimum bending radius: r (mm) at which cracks occur on the surface of the test piece is measured, and this r and the thickness of the test piece: t Ratio: r / t.
【0015】はんだの熱剥離試験は、厚さ:0.25mm
×幅:15mm×長さ:60mmの寸法をもった試験片を、
ロジンフラックスで処理し、温度:230℃の60%S
n−40%Pb合金のはんだ浴中に浸漬して、その表面
に前記はんだを付着させ、この状態で、大気中、温度:
150℃に1000時間保持の条件で加熱し、加熱後、
試験片を180°密着曲げし、再び180°曲げ戻す条
件で行ない、この180°曲げ部におけるはんだ剥離の
有無を観察し、はんだの耐熱剥離性を評価した。Thermal peel test of solder, thickness: 0.25 mm
× width: 15 mm × length: a test piece having a dimension of 60 mm,
Treated with rosin flux, temperature: 230 ° C, 60% S
It is dipped in a solder bath of n-40% Pb alloy to make the solder adhere to its surface, and in this state, in air, at temperature:
After heating at 150 ℃ for 1000 hours, after heating,
The test piece was tightly bent by 180 ° and then bent again by 180 °, and the presence or absence of solder peeling at this 180 ° bent portion was observed to evaluate the heat peeling resistance of the solder.
【0016】また、エッチング面の表面粗さは、試験片
の表面を脱脂した後、温度:45℃の42%塩化第二鉄
水溶液に浸漬して厚さ方向に0.1±0.02mmエッチ
ングし、この結果のエッチング面について、圧延方向に
対して直角方向に長さ:0.8mmづつ任意10ヶ所の表
面粗さを測定し、この10ヶ所の測定結果のうちで最も
高い(粗い)表面粗さをもって示した。これらの測定結
果を表4,5に示した。The surface roughness of the etched surface is such that after degreasing the surface of the test piece, it is immersed in a 42% ferric chloride aqueous solution at a temperature of 45 ° C. and etched by 0.1 ± 0.02 mm in the thickness direction. Then, on the resulting etched surface, the surface roughness was measured at an arbitrary 10 points in lengths of 0.8 mm in the direction perpendicular to the rolling direction, and the highest (rough) surface was obtained from the measurement results at these 10 points. The roughness is shown. The measurement results are shown in Tables 4 and 5.
【0017】[0017]
【表1】 [Table 1]
【0018】[0018]
【表2】 [Table 2]
【0019】[0019]
【表3】 [Table 3]
【0020】[0020]
【表4】 [Table 4]
【0021】[0021]
【表5】 [Table 5]
【0022】[0022]
【発明の効果】表1〜5に示される結果から、本発明C
u合金板材1〜14は、いずれも従来Cu合金板材1〜
4と同等の高強度と導電率をもち、一方エッチング面の
表面粗さおよび曲げ加工性、さらにはんだの耐熱剥離性
については、従来Cu合金板材1〜4に比して一段とす
ぐれたものになっており、また比較Cu合金板材1〜9
に見られるように、Cu合金の構成成分のうちのいずれ
かの成分含有量がこの発明の範囲から外れると上記の特
性のうちの少なくともいずれかの特性が劣ったものにな
ることが明らかである。From the results shown in Tables 1 to 5, the present invention C is obtained.
u alloy plate materials 1 to 14 are all conventional Cu alloy plate materials 1 to 14.
It has the same high strength and conductivity as No. 4, while the surface roughness and bending workability of the etched surface, and the heat-resistant peeling property of the solder are much better than those of the conventional Cu alloy sheet materials 1 to 4. And comparative Cu alloy plate materials 1 to 9
As can be seen from the above, when the content of any one of the constituents of the Cu alloy is out of the range of the present invention, it is clear that at least one of the above-mentioned characteristics becomes inferior. .
【0023】上述のように、この発明のCu合金板材
は、特にエッチング面が平滑で、かつすぐれた曲げ加工
性を有し、さらにはんだの耐熱剥離性にもすぐれている
ので、これらの特性が要求される集積度の高い半導体装
置のリードフレーム材や、形状が複雑にして薄肉化の傾
向にある端子およびコネクターなどの各種電気電子部品
の製造に用いた場合に長期に亘ってすぐれた性能を発揮
するのである。As described above, the Cu alloy sheet according to the present invention has a smooth etching surface, excellent bending workability, and excellent heat peeling resistance of solder. When used for the manufacture of various electrical and electronic parts such as lead frame materials for highly integrated semiconductor devices and terminals and connectors whose shapes are complicated and tend to be thin, long-term excellent performance is obtained. It works.
フロントページの続き (72)発明者 桑原 萬平 福島県会津若松市扇町128−7 三菱伸銅 株式会社若松製作所内 (72)発明者 千葉 俊一 福島県会津若松市扇町128−7 三菱伸銅 株式会社若松製作所内 (72)発明者 榊原 直男 福島県会津若松市扇町128−7 三菱伸銅 株式会社若松製作所内 (72)発明者 小田嶋 美智代 福島県会津若松市扇町128−7 三菱伸銅 株式会社若松製作所内 (72)発明者 熊谷 淳一 福島県会津若松市扇町128−7 三菱伸銅 株式会社若松製作所内Front page continued (72) Inventor Manpei Kuwahara 128-7 Ogimachi, Aizuwakamatsu, Fukushima Prefecture Mitsubishi Shindoh Co., Ltd. Wakamatsu Manufacturing (72) Inventor Shunichi Chiba 128-7, Ogimachi, Aizuwakamatsu, Fukushima Mitsubishi Shindoh Co., Ltd. Wakamatsu (72) Inventor Nao Sakakibara 128-7 Ogimachi, Aizuwakamatsu, Fukushima Prefecture 128-7 Mitsubishi Shindoh Co., Ltd. Wakamatsu Manufacturing (72) Inventor Michiyo Odajima 128-7, Ogimachi, Aizuwakamatsu, Fukushima Mitsubishi Shindoh Co., Ltd. Wakamatsu Manufacturing Co., Ltd. (72) Inventor Junichi Kumagai 128-7 Ogimachi, Aizuwakamatsu, Fukushima Prefecture Wakamatsu Works, Mitsubishi Shindoh Co., Ltd.
Claims (1)
Si:0.05〜1.2%、Sn:0.07〜
2.5%、 Mg:0.001〜0.2%、Z
n:0.1〜3%、 Fe:0.007〜
0.25%、Mo:0.0002〜0.03%、を含有
し、残りがCuと不可避不純物からなる組成、並びに平
均結晶粒径が30μm以下にして、析出物の最大径が3
μm以下である微細組織を有することを特徴とする電気
電子部品用Cu合金板材。1. By weight%, Ni: 0.4-5%,
Si: 0.05 to 1.2%, Sn: 0.07 to
2.5%, Mg: 0.001-0.2%, Z
n: 0.1 to 3%, Fe: 0.007 to
0.25%, Mo: 0.0002 to 0.03%, with the balance being Cu and unavoidable impurities, the average crystal grain size being 30 μm or less, and the maximum precipitate size being 3
A Cu alloy plate material for electric and electronic parts, which has a fine structure of not more than μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP22085592A JP3275377B2 (en) | 1992-07-28 | 1992-07-28 | Cu alloy sheet with fine structure for electric and electronic parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22085592A JP3275377B2 (en) | 1992-07-28 | 1992-07-28 | Cu alloy sheet with fine structure for electric and electronic parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0641660A true JPH0641660A (en) | 1994-02-15 |
JP3275377B2 JP3275377B2 (en) | 2002-04-15 |
Family
ID=16757601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22085592A Expired - Lifetime JP3275377B2 (en) | 1992-07-28 | 1992-07-28 | Cu alloy sheet with fine structure for electric and electronic parts |
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