JPH0640955Y2 - 磁気軸受型ターボ分子ポンプ - Google Patents

磁気軸受型ターボ分子ポンプ

Info

Publication number
JPH0640955Y2
JPH0640955Y2 JP13975088U JP13975088U JPH0640955Y2 JP H0640955 Y2 JPH0640955 Y2 JP H0640955Y2 JP 13975088 U JP13975088 U JP 13975088U JP 13975088 U JP13975088 U JP 13975088U JP H0640955 Y2 JPH0640955 Y2 JP H0640955Y2
Authority
JP
Japan
Prior art keywords
rotor
molecular pump
magnetic bearing
blade
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13975088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261198U (OSRAM
Inventor
幸夫 村井
康 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP13975088U priority Critical patent/JPH0640955Y2/ja
Publication of JPH0261198U publication Critical patent/JPH0261198U/ja
Application granted granted Critical
Publication of JPH0640955Y2 publication Critical patent/JPH0640955Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP13975088U 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ Expired - Lifetime JPH0640955Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13975088U JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13975088U JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH0261198U JPH0261198U (OSRAM) 1990-05-07
JPH0640955Y2 true JPH0640955Y2 (ja) 1994-10-26

Family

ID=31403301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13975088U Expired - Lifetime JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0640955Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0261198U (OSRAM) 1990-05-07

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