JPH0639453Y2 - ウエハ用バスケット - Google Patents
ウエハ用バスケットInfo
- Publication number
- JPH0639453Y2 JPH0639453Y2 JP1988123134U JP12313488U JPH0639453Y2 JP H0639453 Y2 JPH0639453 Y2 JP H0639453Y2 JP 1988123134 U JP1988123134 U JP 1988123134U JP 12313488 U JP12313488 U JP 12313488U JP H0639453 Y2 JPH0639453 Y2 JP H0639453Y2
- Authority
- JP
- Japan
- Prior art keywords
- mark
- basket
- plate
- identification mark
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 38
- 239000000126 substance Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920006026 co-polymeric resin Polymers 0.000 claims description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 239000004810 polytetrafluoroethylene Substances 0.000 description 10
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002386 leaching Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988123134U JPH0639453Y2 (ja) | 1988-09-19 | 1988-09-19 | ウエハ用バスケット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988123134U JPH0639453Y2 (ja) | 1988-09-19 | 1988-09-19 | ウエハ用バスケット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0244333U JPH0244333U (enExample) | 1990-03-27 |
| JPH0639453Y2 true JPH0639453Y2 (ja) | 1994-10-12 |
Family
ID=31371707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988123134U Expired - Lifetime JPH0639453Y2 (ja) | 1988-09-19 | 1988-09-19 | ウエハ用バスケット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639453Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101866122B1 (ko) * | 2017-02-10 | 2018-06-08 | 이경택 | 플라스틱 상자의 네임카드 걸이구 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230130726A (ko) * | 2021-02-15 | 2023-09-12 | 가부시키가이샤 무라타 세이사쿠쇼 | 수납 케이스 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346994A (en) * | 1976-10-08 | 1978-04-27 | Yamanouchi Pharmaceut Co Ltd | Novel 7-(5-amino-1,3,4-thiadiazol-2-yl)thioacetamide-d3-cephem-4-carboxylic acid derivatives and their preparation |
| JPS5546994A (en) * | 1978-09-30 | 1980-04-02 | Toppan Printing Co Ltd | Card containing photograph |
| JPS62165947A (ja) * | 1986-01-17 | 1987-07-22 | Mitsubishi Electric Corp | 搬送治具 |
| JPS6388818A (ja) * | 1986-10-02 | 1988-04-19 | Mitsubishi Electric Corp | 基板収納用カセツト |
-
1988
- 1988-09-19 JP JP1988123134U patent/JPH0639453Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101866122B1 (ko) * | 2017-02-10 | 2018-06-08 | 이경택 | 플라스틱 상자의 네임카드 걸이구 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244333U (enExample) | 1990-03-27 |
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