JPH0639453Y2 - Wafer basket - Google Patents

Description

TECHNICAL FIELD OF THE INVENTION The present invention relates to a wafer basket for transporting a large number of silicon wafers constituting a semiconductor circuit.

Technical background of the invention and its problems In general, a wafer basket for accommodating and transporting a large number of flat silicon wafers is widely used in the manufacturing process of ICs, LSIs and the like.

At the request of the process control side, an identification mark indicating the production lot number, the production date, etc. is attached to this wafer basket, and the silicon wafers housed in this basket are managed individually. ing.

In the conventional wafer basket, the identification mark is directly written on the wall surface of the wafer basket by using a felt pen or a sticker having the identification mark is attached.

However, such means have drawbacks in that the identification symbol is complicated, the written characters are easily erased, and the sticker is easily peeled off.

Therefore, recently, for example, a wafer basket 1 as shown in FIG. 6 is used.

This wafer basket 1 has a basket body 3 in which a groove 2 for accommodating a large number of silicon wafers W is formed.
A plurality of protrusions 7 serving as identification marks M are formed on the outer peripheral wall 6 including the side wall 4 or the end wall 5 of the basket body 3. The position, the number, etc. of the projections 7 are appropriately changed by each basket 1, and by detecting this with an optical sensor (not shown) or the like,
The basket 1 is automatically conveyed to a predetermined processing line (see Japanese Utility Model Publication No. 61-158943, Japanese Utility Model Publication No. 62-239635, etc.).

However, in the wafer basket 1, the constituent material of the basket 1 is chemically deteriorated by the treatment liquid or the like for chemically treating the silicon wafer W, and the surface of the protrusion 7 is changed, so that the reflectance is changed and the identification accuracy is improved. Further, since the basket main body 3 itself is formed with the projections 7, the identification mark M is fixed for each basket, and it cannot be used for other wafer baskets. There is a drawback that.

Further, in JP-A-60-211957, a plurality of holes are provided in the main body of a wafer basket, and the holes are appropriately closed by a plug to form the above-mentioned identification mark. What is intended to be read is disclosed.

However, similarly to the case where the protrusion 7 is formed, this also has a drawback that the identification mark is fixed, cannot be used for other wafer baskets, and lacks versatility. Further, in JP-A-61-236136, JP-A-61-267338, JP-A-62-123735, etc., information display elements, ceramic resonators and
Although the one using an IC card is disclosed, such an identification means has a drawback that it requires additional equipment individually, resulting in a high equipment cost.

Here, as described above, the wafer basket may be directly immersed in the chemical bath during the chemical treatment of the silicon wafer with a large number of silicon wafers housed therein. It is necessary to prevent impurities from leaching into the chemical solution and leaching into the chemical solution.

The present invention has been made in view of the above, and it is excellent in identification accuracy, can change and display the identification mark, is versatile, and does not require expensive auxiliary equipment, and is also suitable for chemicals. An object of the present invention is to provide a wafer basket which is prevented from being attacked and impurities from being dissolved out in a chemical solution.

SUMMARY OF THE INVENTION In order to achieve such an object, a wafer basket according to the present invention is a wafer basket having an identification mark on the outer peripheral wall of the basket body, wherein a plate mounting portion is formed on the outer peripheral wall of the basket body. A mark plate is removably attached to this plate attachment portion. This mark plate is a substrate made of tetrafluoroethylene resin having chemical resistance with the identification mark and laminated on the surface of this substrate. It is characterized by comprising a film made of a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin having transparency and chemical resistance capable of visually recognizing the identification mark.

In a wafer basket with such a structure, a mark plate is formed only by using fluorocarbon resin that has chemical resistance without using an adhesive, and the identification mark is covered with a film to form a mark plate that can be attached to or detached from the basket body. Since it is attached freely, the mark plate is not attacked by chemicals, the identification mark is effectively protected by a film, and the accuracy of identification does not deteriorate, and the impurities such as adhesive dissolve out in the chemical solution. It doesn't get dirty. Also,
Since the mark plate can be easily changed to another mark plate having another identification mark, the basket has excellent versatility.

DETAILED DESCRIPTION OF THE INVENTION The present invention will be described in detail below with reference to the embodiments shown in the drawings.

FIG. 1 is a schematic perspective view showing an embodiment of the present invention, and the same members as those shown in FIG. 5 are designated by the same reference numerals.

The wafer basket 10 shown in FIG. 1 has a basket main body 3 that accommodates a large number of silicon wafers W forming a semiconductor circuit in parallel.

The basket body 3 is made of a material having chemical resistance in order to sequentially perform chemical treatment on the silicon wafer W, and the groove portion 2 for accommodating a large number of the silicon wafer W is formed inside the basket body 3 and the end wall. The mark plate 11 is detachably attached to the plate 5.

As shown in FIG. 2, the mark plate 11 is made of a chemical-resistant base material 12 made of tetrafluoroethylene resin (PTFE) having a surface on which an identification mark M such as a bar code is attached. A film 13 made of tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin (PFA) having chemical resistance is laminated.

Here, since the PTFE and PFA do not stick to any substance, that is, the adhesive does not work, PT
Lamination of the PFA film 13 on the FE substrate 12
Both 12 and 13 are melted by heat welding.

That is, PTFE has a melting point of about 327 ° C, and PFA has a melting point of about 305 ° C.
Since it is ℃, for example, in a state in which the PFA film 13 is sandwiched between the upper and lower sides of the PTFE substrate 12, by heating this above the melting point of the PTFE, both are melted and heat-welded. There is.

Here, since PTFE has a property that it does not flow even if it exceeds the melting point, the identification mark M attached to the surface of the PTFE substrate 12 disappears or is distorted even if it is heat-welded in this way. You won't get lost.

The identification mark M is preferably of a carbon type, and since the substrate 12 made of PTFE is difficult for ink to deposit on the substrate 12 as it is, it is preferable to use a substrate that has been rebaked after cutting. This is because the surface of the substrate 12 made of PTFE is roughened by the re-baking, and the ink can be spread on the surface better.

The PFA film 13 is required to be semi-transparent such that the identification mark M is visible from the outside, or wholly or partially transparent.

The mark plate 11 is detachably attached to the plate attachment portion T provided on the end wall 5 of the basket body 3.

In the case of this embodiment, the plate mounting portion T is a protrusion Ta, and the protrusion Ta is fitted in the mounting hole O provided in the mark plate 11.

Next, the operation will be described.

After accommodating a large number of silicon wafers W in the wafer basket body 3, an identification mark M on which information necessary for the process control of the silicon wafer W, such as a manufacturing lot number and a manufacturing date, is displayed. Attach the attached mark plate 11.

This mark plate 11 has chemical resistance on the surface of a chemical-resistant PTFE substrate 12 having an identification mark M.
Since the film 13 made of PAF is laminated, even if the basket body 3 is directly immersed in a chemical bath or the like, the mark plate 11 and thus the identification mark M is not damaged by the chemical or the like.

Therefore, even when the identification mark M is read by the bar code reading device, the identification accuracy is not deteriorated and the identification mark M can be reliably read.

Moreover, since the mark plate 11 is made of only a fluororesin having chemical resistance without using an adhesive, the mark plate 11 may be damaged by a chemical solution,
Impurities such as adhesive will not dissolve into the chemical solution and stain it.

In addition, the silicon wafer W inside the wafer basket
When the identification mark M is to be changed due to the exchange of another identification mark, the mark plate with the other identification mark M is attached.
11 may be attached to the end wall 5 of the basket body 3 or the like. By doing so, the basket body 3 can be shared by simply replacing the mark plate 11 with another one, and the versatility of the basket body 3 is increased.

FIG. 3 shows another embodiment of the present invention, in which the plate mounting portion T is provided with a pair of L's on the end wall 5 of the basket body 3.
Attach the angle-shaped material 16, 16
A mark plate insertion groove 17 is formed by both inner side surfaces of 16.

In this embodiment, the mark plate 11 is attached by inserting the mark plate 11 into the mark plate insertion groove 17. However, in order to completely prevent the mark plate 11 from falling off, the mark plate insertion Groove 17
It is necessary to make the width l ₂ of the mark plate 11 slightly larger than the width l _{1 of the} mark plate ₁ , or to make the mark plate 11 and the mark plate insertion groove 17 fit into each other.

FIG. 4 shows still another embodiment of the present invention, in which the plate mounting portion T has a pair of mounting holes 18, 18 formed in the end wall 5 of the basket body 3, and both mounting holes are formed. The pins 19 protruding from the mark plate 11 side are fitted into the 18, 18 pins.

Also in this case, in order to completely prevent the mark plate 11 from falling off, it is preferable that the pin 19 be a split pin having a projection at its tip, and this pin engages with the mounting hole 18.

FIG. 5 shows still another embodiment of the present invention, in which the plate mounting portion T has a rectangular parallelepiped protrusion 20 formed on the end wall 5 of the basket body 3, and the protrusion 20 is used as a mark plate. A pair of elastic leg pieces 21 and 21 projecting from the 11 side are configured to clamp. Even in this case, the mark plate 11
In order to prevent the falling off, it is necessary to fit the protrusion 20 and the elastic leg piece 21 in a concavo-convex manner.

The present invention is not limited to the above-described embodiment, and the plate mounting portion T may have a concave-convex relationship between the mark plate 11 side and the basket body 3 side, and the mounting position of the plate mounting portion T may be reversed. Needless to say, not only the end wall 5 but also the outer peripheral wall 6 such as the side wall 4 may be used. Further, the identification mark M is not limited to a bar code, and may be any other known identification mark.

Effect of the Invention As described above, according to the present invention, the mark plate is formed without using an adhesive, only with the fluororesin having chemical resistance, and the identification mark is covered with the film. Is not attacked by chemicals, and the identification mark is effectively protected by a film to prevent the accuracy of identification from decreasing, and impurities such as adhesives are dissolved out in the chemical solution and stain it. Can be prevented.

Also, by attaching the mark plate to the basket body in a detachable manner, this identification mark can be changed and displayed as needed, and this mark plate can be changed to another one, increasing the versatility of the basket body. become.

In addition, if the identification mark is a bar code, when the identification mark is read, it can be easily read without requiring expensive equipment, and the manufacturing cost is not high.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a wafer basket according to the present invention, FIG. 2 is a sectional view taken along the line II-II of FIG. 1, and FIGS. FIG. 6 is a schematic perspective view showing a conventional wafer basket, showing another embodiment of the main part. 3 ... Basket main body, 4 ... Side wall, 5 ... End wall, 10 ...
… Wafer basket, 11 …… Mark plate, 12 ……
Substrate, 13 ... Film, T ... Plate mounting part, M ...
Identification mark, W ... Silicon wafer

Claims (1)

[Scope of utility model registration request] 1. A wafer basket having an identification mark on an outer peripheral wall of a basket body, wherein a plate mounting portion is formed on the outer peripheral wall of the basket body, and a mark plate is detachably mounted on the plate mounting portion. ,
This mark plate is composed of a substrate made of chemical-resistant tetrafluoroethylene resin having the identification mark, and a transparent and chemical-resistant four-fluorine film laminated on the surface of the substrate so that the identification mark can be seen. A basket for wafers, which comprises a film made of a modified ethylene-perfluoroalkyl vinyl ether copolymer resin.