JPH0244333U - - Google Patents
Info
- Publication number
- JPH0244333U JPH0244333U JP12313488U JP12313488U JPH0244333U JP H0244333 U JPH0244333 U JP H0244333U JP 12313488 U JP12313488 U JP 12313488U JP 12313488 U JP12313488 U JP 12313488U JP H0244333 U JPH0244333 U JP H0244333U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- basket
- plate
- attached
- identification mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第1図は、本考案に係るウエハ用バスケツトを
示す概略斜視図、第2図は、第1図の―線に
沿う断面図、第3〜5図は、それぞれ本考案の他
の実施例を示す要部斜視図、第6図は、従来のウ
エハ用バスケツトを示す概略斜視図である。
3……バスケツト本体、4……側壁、5……端
壁、10……ウエハ用バスケツト、11……マー
クプレート、12……基板、T……プレート取付
部、M……識別マーク、W……シリコンウエハ。
FIG. 1 is a schematic perspective view showing a wafer basket according to the present invention, FIG. 2 is a sectional view taken along the line - - in FIG. 1, and FIGS. 3 to 5 show other embodiments of the present invention. FIG. 6 is a schematic perspective view showing a conventional wafer basket. 3...Basket body, 4...Side wall, 5...End wall, 10...Wafer basket, 11...Mark plate, 12...Substrate, T...Plate mounting portion, M...Identification mark, W... ...Silicon wafer.
Claims (1)
するウエハ用バスケツトにおいて、前記バスケツ
ト本体の外周壁にはプレート取付部が形成してあ
り、 このプレート取付部にマークプレートが着脱自
在に取付けられ、 このマークプレートは、前記識別マークが付さ
れた基板と、この基板の表面にラミネートされ、
識別マークを目視できる透明性および耐薬品性を
有するフイルムとから成ることを特徴とするウエ
ハ用バスケツト。 (2) 前記識別マークは、バーコードであること
を特徴とする請求項第1項に記載のウエハ用バス
ケツト。[Claims for Utility Model Registration] (1) In a wafer basket having an identification mark on the outer circumferential wall of the basket body, a plate attachment part is formed on the outer circumference wall of the basket body, and the mark plate is attached to the plate attachment part. is removably attached, and this mark plate is laminated to the board on which the identification mark is attached and the surface of this board,
A wafer basket comprising a film having transparency and chemical resistance that allows identification marks to be visually seen. (2) The wafer basket according to claim 1, wherein the identification mark is a bar code.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988123134U JPH0639453Y2 (en) | 1988-09-19 | 1988-09-19 | Wafer basket |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988123134U JPH0639453Y2 (en) | 1988-09-19 | 1988-09-19 | Wafer basket |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0244333U true JPH0244333U (en) | 1990-03-27 |
JPH0639453Y2 JPH0639453Y2 (en) | 1994-10-12 |
Family
ID=31371707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988123134U Expired - Lifetime JPH0639453Y2 (en) | 1988-09-19 | 1988-09-19 | Wafer basket |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0639453Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101866122B1 (en) * | 2017-02-10 | 2018-06-08 | 이경택 | Name card hanger of plastic box |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5346994A (en) * | 1976-10-08 | 1978-04-27 | Yamanouchi Pharmaceut Co Ltd | Novel 7-(5-amino-1,3,4-thiadiazol-2-yl)thioacetamide-d3-cephem-4-carboxylic acid derivatives and their preparation |
JPS5546994A (en) * | 1978-09-30 | 1980-04-02 | Toppan Printing Co Ltd | Card containing photograph |
JPS62165947A (en) * | 1986-01-17 | 1987-07-22 | Mitsubishi Electric Corp | Conveying jig |
JPS6388818A (en) * | 1986-10-02 | 1988-04-19 | Mitsubishi Electric Corp | Cassette for housing substrate |
-
1988
- 1988-09-19 JP JP1988123134U patent/JPH0639453Y2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5346994A (en) * | 1976-10-08 | 1978-04-27 | Yamanouchi Pharmaceut Co Ltd | Novel 7-(5-amino-1,3,4-thiadiazol-2-yl)thioacetamide-d3-cephem-4-carboxylic acid derivatives and their preparation |
JPS5546994A (en) * | 1978-09-30 | 1980-04-02 | Toppan Printing Co Ltd | Card containing photograph |
JPS62165947A (en) * | 1986-01-17 | 1987-07-22 | Mitsubishi Electric Corp | Conveying jig |
JPS6388818A (en) * | 1986-10-02 | 1988-04-19 | Mitsubishi Electric Corp | Cassette for housing substrate |
Also Published As
Publication number | Publication date |
---|---|
JPH0639453Y2 (en) | 1994-10-12 |