JPH03116041U - - Google Patents
Info
- Publication number
- JPH03116041U JPH03116041U JP2588990U JP2588990U JPH03116041U JP H03116041 U JPH03116041 U JP H03116041U JP 2588990 U JP2588990 U JP 2588990U JP 2588990 U JP2588990 U JP 2588990U JP H03116041 U JPH03116041 U JP H03116041U
- Authority
- JP
- Japan
- Prior art keywords
- identification mark
- wafer
- basket
- base material
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案に係るウエハ用バスケツトを示
す概略斜視図、第２図は第１図の−線に沿う
断面図、第３図乃至第７図はそれぞれ本考案の他
の実施例を示す要部断面図、第８図は本考案の他
の実施例に係るウエハ用バスケツトの要部正面図
、第９図は、第８図の−線に沿う断面図、第
１０図は本考案の他の実施例を示す要部断面図、
第１１図は従来のウエハ用バスケツトを示す概略
斜視図である。
３……バスケツト本体、４……側壁、５……端
壁、６……外周壁、１０……ウエハ用バスケツト
、１１……マークプレート、１２……基材、１３
……フイルム、１３ａ……表面側フイルム、１３
ｂ……側面側フイルム（他面側フイルム）、１３
ｃ……裏面側フイルム（他面側フイルム）、Ｍ…
…識別マーク、Ｗ……シリコンウエハ。
Fig. 1 is a schematic perspective view showing a wafer basket according to the present invention, Fig. 2 is a sectional view taken along the - line in Fig. 1, and Figs. 3 to 7 each show other embodiments of the present invention. 8 is a front view of the main parts of a wafer basket according to another embodiment of the present invention, FIG. 9 is a sectional view taken along the line - in FIG. 8, and FIG. A sectional view of main parts showing other embodiments,
FIG. 11 is a schematic perspective view showing a conventional wafer basket. 3...Basket body, 4...Side wall, 5...End wall, 6...Outer peripheral wall, 10...Wafer basket, 11...Mark plate, 12...Base material, 13
...Film, 13a...Front side film, 13
b...Side side film (other side film), 13
c... Back side film (other side film), M...
...Identification mark, W...Silicon wafer.
Claims (1)
るウエハ用バスケツトにおいて、 前記識別マークが付された表面を有する基材と
、この基材の表面にラミネートされ、前記識別マ
ークを目視できる透明性および耐薬品性を有する
表面側フイルムとから成るマークプレートが、前
記バスケツト本体の外周壁に融着固定してあるこ
とを特徴とするウエハ用バスケツト。 ２ 前記識別マークは、バーコードであることを
特徴とする請求項第１項に記載のウエハ用バスケ
ツト。[Claims for Utility Model Registration] 1. A wafer basket having an identification mark on the outer peripheral wall of the basket body, comprising: a base material having a surface with the identification mark; and a base material laminated on the surface of the base material, the identification mark 1. A wafer basket characterized in that a mark plate consisting of a transparent and chemical-resistant surface film that allows the wafer to be visually observed is fused and fixed to the outer peripheral wall of the basket body. 2. The wafer basket according to claim 1, wherein the identification mark is a bar code.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025889U JPH0735398Y2 (en) | 1990-03-14 | 1990-03-14 | Wafer basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025889U JPH0735398Y2 (en) | 1990-03-14 | 1990-03-14 | Wafer basket |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03116041U true JPH03116041U (en) | 1991-12-02 |
| JPH0735398Y2 JPH0735398Y2 (en) | 1995-08-09 |
Family
ID=31528807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990025889U Expired - Lifetime JPH0735398Y2 (en) | 1990-03-14 | 1990-03-14 | Wafer basket |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735398Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11255242A (en) * | 1998-03-11 | 1999-09-21 | Nippon Grease Nipple Kk | Method for seal-welding plate-like article in storage recessed part, and resin product welded using the method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62123735A (en) * | 1985-11-22 | 1987-06-05 | Mitsubishi Electric Corp | Wafer cassette |
| JPH01316957A (en) * | 1988-06-15 | 1989-12-21 | Nec Corp | Sheet-feeder type processing device |
| JPH0284319U (en) * | 1988-12-20 | 1990-06-29 |
-
1990
- 1990-03-14 JP JP1990025889U patent/JPH0735398Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62123735A (en) * | 1985-11-22 | 1987-06-05 | Mitsubishi Electric Corp | Wafer cassette |
| JPH01316957A (en) * | 1988-06-15 | 1989-12-21 | Nec Corp | Sheet-feeder type processing device |
| JPH0284319U (en) * | 1988-12-20 | 1990-06-29 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11255242A (en) * | 1998-03-11 | 1999-09-21 | Nippon Grease Nipple Kk | Method for seal-welding plate-like article in storage recessed part, and resin product welded using the method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0735398Y2 (en) | 1995-08-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |