JPS62165947A - Conveying jig - Google Patents

Conveying jig

Info

Publication number
JPS62165947A
JPS62165947A JP858186A JP858186A JPS62165947A JP S62165947 A JPS62165947 A JP S62165947A JP 858186 A JP858186 A JP 858186A JP 858186 A JP858186 A JP 858186A JP S62165947 A JPS62165947 A JP S62165947A
Authority
JP
Japan
Prior art keywords
jig
block
view
conveying jig
showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP858186A
Other languages
Japanese (ja)
Inventor
Shigeru Sato
茂 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP858186A priority Critical patent/JPS62165947A/en
Publication of JPS62165947A publication Critical patent/JPS62165947A/en
Pending legal-status Critical Current

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  • Packaging Frangible Articles (AREA)

Abstract

PURPOSE:To improve the accuracy of a conveying jig by providing an identifying function by a stationary structure, and inserting it into the receptacle of a conveying jig body to readily replace it. CONSTITUTION:An arbitrary ID block 9a or 9b is inserted by a pin 8 and a jack 10 into a receptacle 7 of a conveying jig body 1. Thus, its replacement can be readily and rapidly performed, its positioning accuracy is improved, and an identification display can be conveniently and automatically read out.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は物体の搬送治具に係り、特にその識別機構に
関するものである、 〔従来の技術〕 小7図は従来の半導体ウェーハのキャリヤの斜視図で、
flidウェーハキャリヤ、(2)はこれに収納さね、
たウェーハ、+31jウエーハキヤリヤfir f &
別するために貼付されたバーコードである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an object conveyance jig, and particularly relates to an identification mechanism thereof. [Prior Art] Figure 7 shows a conventional semiconductor wafer carrier. In a perspective view,
flid wafer carrier, (2) is stored in this,
+31j wafer carrier fir f &
This is a barcode attached for identification purposes.

第8図は従来のチューブランクを示す斜視図で、(41
ハチユーブラツク、(61ケこねに収納された製品化半
導体集積回路装置(IC) 、 +61はre(6+の
チューブラツク(4)からの脱落を防止する止めビンで
ある。
Figure 8 is a perspective view showing a conventional tube rank.
The product semiconductor integrated circuit device (IC) housed in the Hachiyu rack (61), +61 is a stopper that prevents the re(6+) from falling off from the tube rack (4).

このチューブラツク(41にも識別のためのバーコード
(31が貼付さねている。
A bar code (31) for identification is also pasted on this tube rack (41).

このように、従来搬送治具にけその辱別のために識別(
ID)機能をもつ紙などを貼りつけて目視で人が判断し
ていた。また、自#I続収りに対応するために最近はバ
ーコードI3Iを璧送治具に貼すつける方式が広く用い
られている。
In this way, identification (
ID) Functional paper or other material was pasted on and people made judgments visually. Furthermore, in order to cope with the need for continuous delivery, a method has recently been widely used in which the barcode I3I is affixed to a feeder jig.

〔発明が解決しようとする間窄点〕[The gap that the invention attempts to solve]

上述のように、バーコードのようなID機能を有する紙
を貼りつける従来の方式でか、その内容は固定であって
、その変ルのためには貼り換える必要があり、容易でな
い上に、貼付位置の精度をよくするのが困Aμであるな
どの間頚点があった。
As mentioned above, the conventional method of pasting paper with an ID function such as a barcode has fixed contents, and it is necessary to change the pasting to change the shape, which is not easy. There were some problems, such as the difficulty in improving the accuracy of the affixing position.

この発明は以上のような問題点を解消するためになされ
たもので、手軽に変更が可能で、所定位置に精度よ〈何
回でも着脱のできる識別機構を有する搬送治具を提供す
ることを目的とする。
This invention was made in order to solve the above-mentioned problems, and aims to provide a transport jig that can be easily changed and has an identification mechanism that can be attached and detached any number of times with high accuracy in a predetermined position. purpose.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る搬送治具は、識別機能部分を固体構造と
し、搬送治具本体に設けられた受け口に挿入するように
したものである。
In the transport jig according to the present invention, the identification function portion has a solid structure and is inserted into a socket provided in the main body of the transport jig.

〔作用〕[Effect]

この発明における搬送治具は、識別機能部分を固体構造
とし、搬送治具本体に設けられた受け口に挿入するよう
にしたので、その交換nHめで容易であり、受け口が固
定であるので、その装着精IQ’に良好に保たれる。
In the transport jig of the present invention, the identification function part has a solid structure and is inserted into the receptacle provided in the main body of the transport jig, so it is easy to replace, and since the receptacle is fixed, the mounting Precise IQ' is well maintained.

〔実施例〕〔Example〕

第1□□□にこの発明の第1の実施例になるウェーハキ
ャリヤの斜視図、第2図けこの第1の実施例に用いる個
別機能ブロック(IDブロック)を示す斜視図である。
FIG. 1 is a perspective view of a wafer carrier according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing an individual functional block (ID block) used in the first embodiment.

図において、第7図の従来例と同一符号に同等部分を示
す。(71[IDブロック受で、(8]汀その中に設け
られ後述のIDブロックのジャックに挿入され5る挿入
ビンである。第2図において、+91灯I Dブロック
を示し、1!¥IA灯数字表示のIDブロック(9a)
、図Bにバーコード表示のIDブロック(9b) ?示
し、MI C1−j一般のIDブロック(91の裏面を
示し、 ilO+HI Dブロック受(7+の挿入ビン
(81と結合するジャックである。
In the figure, equivalent parts are indicated by the same reference numerals as in the conventional example of FIG. 7. (71[ID block receiver, (8) is an insertion bin provided therein and inserted into the jack of the ID block described later. In Figure 2, +91 light ID block is shown, 1!\IA ID block with light numeric display (9a)
, ID block (9b) with barcode displayed in Figure B? The back of the MI C1-j general ID block (91 is shown), and the ilO+HID block receiver (7+ is a jack that connects with the insertion bin (81).

このgrjlの実施例でけ任意のIDブロック(9a)
またLrj(9b)を搬送治具本体illのIDブロッ
ク受(71へ挿入ビン(8)オよびジャックlot i
用いて挿入して用いる。第3図はIDブロック(9a)
を挿入した状態を示す正面図である。
An arbitrary ID block (9a) in this example of grjl
In addition, insert the Lrj (9b) into the ID block receiver (71) of the transport jig body ill.
insert and use. Figure 3 shows ID block (9a)
FIG. 3 is a front view showing a state in which the

果4向けこの発明の第2の実施例を示す斜視図で、第5
図けこの第2の実施例に用いるIDユニットを示す斜視
図である。(lO)はIDユニット受で。
FIG. 4 is a perspective view showing a second embodiment of the present invention,
FIG. 3 is a perspective view showing an ID unit used in a second embodiment of the present invention. (lO) is the ID unit receiver.

01)ハその中に投けられ後述のIDユニットノ挿入ビ
ンか挿入さ稍るジャックである。、第5図において、Q
2け10ユニツト、03はその背後に2役けらね上述の
IDユニット受(1o;のジャック01)に挿入される
挿入ビンである。IDユニット受(101にけ複攻俯の
IDユニットa2’r挿入する。第6図にrDユニット
受(10)に5個のIDユニットσaを挿入した状態全
示す正面図である。
01) It is a jack into which an insertion bin or an ID unit, which will be described later, is inserted. , in Figure 5, Q
Behind the 2-digit 10 unit, 03 is an insertion bin that is inserted into the above-mentioned ID unit receiver (1o; jack 01). The double attack ID unit a2'r is inserted into the ID unit receiver (101). FIG. 6 is a front view showing the entire state in which five ID units σa are inserted into the rD unit receiver (10).

以上各実症例ともIDブロック、 IDユニットとも識
別表示はバーコード、枚字て限らず任意の表示が可能で
ある。また色彩による表示も可能である。なお、上2実
施例でに半導体ウェーハキャリヤに適用[7た場合を示
したが、一般の物体の搬送治具にこの発明は適用で永る
In each of the above actual cases, ID blocks and ID units can be identified in any way, not just barcodes or letters. It is also possible to display in color. Incidentally, although the above two embodiments show the case where the present invention is applied to a semiconductor wafer carrier, the present invention can also be applied to a general object conveyance jig.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明における搬送治具で灯、その個
別機能部分を治具本体とけ別個の固体構造とし、治具本
体の所要位置に設けられた受け口に挿入して用いるよう
にしたので、必要に応じてその交換に容易、迅速に行な
うことができ、しかもその装着位e精/fに良好で識別
表示の自動読賎り【も好都合である。
As described above, in the transportation jig of the present invention, the light and its individual functional parts are made into separate solid structures that are separated from the jig body, and are used by being inserted into sockets provided at desired positions on the jig body. It is convenient to be able to easily and quickly replace it if necessary, to have a good mounting position, and to automatically read the identification display.

【図面の簡単な説明】[Brief explanation of drawings]

第1 I’21はこの発明のπ1の実施例を示す斜ネー
F、’図、第2 PI+はこの第1の実施例に用いるI
Dブロックを示す斜視図、第3図けIDブロックを挿入
した状態の第1の実施例を示す正面図、第41てはこの
発明の第2の実施例を示す斜視図、第5図にこの@2の
実施例に用いるIDユニットを示す斜視図、第6図はI
Dユニットを挿入した状態の嘉2の実施例を示す正面■
、第7図は従来の半導体ウェーハのキャリヤを示す斜視
図、第8F!Aは従来のチューブラツクを示す斜視図で
ある。 図1において、illは搬送治具(半導体ウェーハキャ
リヤ)−+71は受け口(IDブロック受) 、 +9
1け識別機能部分(IDブロック) 、 t+o+け受
け口(IDユニット受)、02は識別機能部分の小部分
(IDユニット)である。 な丸・、図中同一符号に同一または相当部分を示す。
The first I'21 shows the π1 embodiment of this invention, and the second PI+ shows the I used in this first embodiment.
FIG. 3 is a perspective view showing the D block, FIG. 3 is a front view showing the first embodiment with the ID block inserted, FIG. 41 is a perspective view showing the second embodiment of the present invention, and FIG. A perspective view showing the ID unit used in the example of @2, Figure 6 is I
Front view showing the embodiment of Ka2 with D unit inserted
, FIG. 7 is a perspective view showing a conventional semiconductor wafer carrier, and FIG. 8F! A is a perspective view showing a conventional tube rack. In FIG. 1, ill is a transport jig (semiconductor wafer carrier) -+71 is a socket (ID block receiver), +9
1 digit identification functional part (ID block), t+o+ digit socket (ID unit receiver), 02 is a small part (ID unit) of the identification functional part. The same reference numerals in the figures indicate the same or equivalent parts.

Claims (2)

【特許請求の範囲】[Claims] (1)物体を搬送する搬送治具において、 当該搬送治具を識別する識別機能部分を上記治具の本体
とは別個の固体構造とし、 上記識別機能部分を上記治具本体に設けられた受け口に
挿入して用いるようにしたことを特徴とする搬送治具。
(1) In a transport jig for transporting an object, the identification function part that identifies the transport jig is a solid structure separate from the main body of the jig, and the identification function part is installed in a receptacle provided in the jig main body. A conveying jig characterized in that it is used by being inserted into a.
(2)識別機能部分を所定数の複数個の小部分で構成し
、 1つの受け口に挿入するようにしたことを特徴とする特
許請求の範囲第1項記載の搬送治具。
(2) The conveyance jig according to claim 1, wherein the identification function portion is composed of a predetermined number of a plurality of small portions, and is configured to be inserted into one socket.
JP858186A 1986-01-17 1986-01-17 Conveying jig Pending JPS62165947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP858186A JPS62165947A (en) 1986-01-17 1986-01-17 Conveying jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP858186A JPS62165947A (en) 1986-01-17 1986-01-17 Conveying jig

Publications (1)

Publication Number Publication Date
JPS62165947A true JPS62165947A (en) 1987-07-22

Family

ID=11696979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP858186A Pending JPS62165947A (en) 1986-01-17 1986-01-17 Conveying jig

Country Status (1)

Country Link
JP (1) JPS62165947A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0266475A (en) * 1988-09-01 1990-03-06 Tokyo Electron Ltd Method for inspecting semiconductor element
JPH0244333U (en) * 1988-09-19 1990-03-27
SG92640A1 (en) * 1999-06-07 2002-11-19 E Pak Resources S Pte Ltd Stud and rider for use on matrix trays

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0266475A (en) * 1988-09-01 1990-03-06 Tokyo Electron Ltd Method for inspecting semiconductor element
JPH0244333U (en) * 1988-09-19 1990-03-27
SG92640A1 (en) * 1999-06-07 2002-11-19 E Pak Resources S Pte Ltd Stud and rider for use on matrix trays

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