JPH0638427Y2 - 磁気浮上型ウエハ搬送装置 - Google Patents
磁気浮上型ウエハ搬送装置Info
- Publication number
- JPH0638427Y2 JPH0638427Y2 JP1987092424U JP9242487U JPH0638427Y2 JP H0638427 Y2 JPH0638427 Y2 JP H0638427Y2 JP 1987092424 U JP1987092424 U JP 1987092424U JP 9242487 U JP9242487 U JP 9242487U JP H0638427 Y2 JPH0638427 Y2 JP H0638427Y2
- Authority
- JP
- Japan
- Prior art keywords
- levitation
- linear motor
- wafer transfer
- guide rail
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987092424U JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987092424U JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63201332U JPS63201332U (US07579456-20090825-P00002.png) | 1988-12-26 |
JPH0638427Y2 true JPH0638427Y2 (ja) | 1994-10-05 |
Family
ID=30954118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987092424U Expired - Lifetime JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0638427Y2 (US07579456-20090825-P00002.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2882501B2 (ja) * | 1992-01-07 | 1999-04-12 | 株式会社ダイフク | 磁気浮上式搬送設備 |
JPH0616206A (ja) * | 1992-07-03 | 1994-01-25 | Shinko Electric Co Ltd | クリーンルーム内搬送システム |
CN109699190B (zh) * | 2017-08-24 | 2023-04-28 | 应用材料公司 | 在真空处理系统中非接触地传输装置及方法 |
JP6796684B2 (ja) * | 2019-05-30 | 2020-12-09 | 日本金銭機械株式会社 | 紙葉類の搬送機構 |
JP6796740B1 (ja) * | 2020-08-11 | 2020-12-09 | 日本金銭機械株式会社 | 空気流制御装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026130A (ja) * | 1983-07-21 | 1985-02-09 | Sanshin Ind Co Ltd | 内燃機関の負圧制御配管 |
JPS60237848A (ja) * | 1984-05-09 | 1985-11-26 | Mitsubishi Electric Corp | リニアモ−タ搬送装置 |
JPS6293120A (ja) * | 1985-10-16 | 1987-04-28 | Daifuku Co Ltd | リニアモ−タ使用の荷搬送装置 |
-
1987
- 1987-06-16 JP JP1987092424U patent/JPH0638427Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63201332U (US07579456-20090825-P00002.png) | 1988-12-26 |
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