JPH0638427Y2 - 磁気浮上型ウエハ搬送装置 - Google Patents

磁気浮上型ウエハ搬送装置

Info

Publication number
JPH0638427Y2
JPH0638427Y2 JP1987092424U JP9242487U JPH0638427Y2 JP H0638427 Y2 JPH0638427 Y2 JP H0638427Y2 JP 1987092424 U JP1987092424 U JP 1987092424U JP 9242487 U JP9242487 U JP 9242487U JP H0638427 Y2 JPH0638427 Y2 JP H0638427Y2
Authority
JP
Japan
Prior art keywords
levitation
linear motor
wafer transfer
guide rail
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987092424U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63201332U (US07579456-20090825-P00002.png
Inventor
祐己 浜田
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1987092424U priority Critical patent/JPH0638427Y2/ja
Publication of JPS63201332U publication Critical patent/JPS63201332U/ja
Application granted granted Critical
Publication of JPH0638427Y2 publication Critical patent/JPH0638427Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Non-Mechanical Conveyors (AREA)
JP1987092424U 1987-06-16 1987-06-16 磁気浮上型ウエハ搬送装置 Expired - Lifetime JPH0638427Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987092424U JPH0638427Y2 (ja) 1987-06-16 1987-06-16 磁気浮上型ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987092424U JPH0638427Y2 (ja) 1987-06-16 1987-06-16 磁気浮上型ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS63201332U JPS63201332U (US07579456-20090825-P00002.png) 1988-12-26
JPH0638427Y2 true JPH0638427Y2 (ja) 1994-10-05

Family

ID=30954118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987092424U Expired - Lifetime JPH0638427Y2 (ja) 1987-06-16 1987-06-16 磁気浮上型ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPH0638427Y2 (US07579456-20090825-P00002.png)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2882501B2 (ja) * 1992-01-07 1999-04-12 株式会社ダイフク 磁気浮上式搬送設備
JPH0616206A (ja) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd クリーンルーム内搬送システム
CN109699190B (zh) * 2017-08-24 2023-04-28 应用材料公司 在真空处理系统中非接触地传输装置及方法
JP6796684B2 (ja) * 2019-05-30 2020-12-09 日本金銭機械株式会社 紙葉類の搬送機構
JP6796740B1 (ja) * 2020-08-11 2020-12-09 日本金銭機械株式会社 空気流制御装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026130A (ja) * 1983-07-21 1985-02-09 Sanshin Ind Co Ltd 内燃機関の負圧制御配管
JPS60237848A (ja) * 1984-05-09 1985-11-26 Mitsubishi Electric Corp リニアモ−タ搬送装置
JPS6293120A (ja) * 1985-10-16 1987-04-28 Daifuku Co Ltd リニアモ−タ使用の荷搬送装置

Also Published As

Publication number Publication date
JPS63201332U (US07579456-20090825-P00002.png) 1988-12-26

Similar Documents

Publication Publication Date Title
JP3251654B2 (ja) 磁気力により物体を浮上及び案内するシステム
US20200346548A1 (en) Contactless driving module and transfer apparatus having the same
JPH0638427Y2 (ja) 磁気浮上型ウエハ搬送装置
US5980193A (en) Magnetically levitated robot and method of increasing levitation force
JP2547403B2 (ja) 真空装置用磁気浮上搬送装置
JP3421095B2 (ja) 超伝導磁気浮上搬送装置
JP2680296B2 (ja) 浮上式搬送装置
JPH05122807A (ja) 搬送装置
JPH07117849A (ja) 磁気浮上搬送装置
JPH06101884B2 (ja) 浮上式搬送装置
JPH0545490B2 (US07579456-20090825-P00002.png)
JPH0428622A (ja) 半導体搬送装置
KR102439631B1 (ko) 자기 부상 이송 장치
JPS63124763A (ja) 物品移送装置
JP2882850B2 (ja) 交流磁気浮上搬送装置
JP2569374Y2 (ja) 磁気浮上スライダ
JPH0422812B2 (US07579456-20090825-P00002.png)
JPS58139439A (ja) ウエハ移送装置
JPH0615441Y2 (ja) 磁気浮上装置
JPS61214767A (ja) 磁気浮上リニアインダクシヨンモ−タ
JP2516787Y2 (ja) 磁気浮上搬送装置
JPS6426308A (en) Carrier device
JPH05238683A (ja) 磁気浮上エレベータ
JPH07118847B2 (ja) 搬送装置
JPS61236302A (ja) クリーンルームなどに用いる搬送装置