JPH0637906Y2 - 板状物体搬送装置 - Google Patents

板状物体搬送装置

Info

Publication number
JPH0637906Y2
JPH0637906Y2 JP1988141233U JP14123388U JPH0637906Y2 JP H0637906 Y2 JPH0637906 Y2 JP H0637906Y2 JP 1988141233 U JP1988141233 U JP 1988141233U JP 14123388 U JP14123388 U JP 14123388U JP H0637906 Y2 JPH0637906 Y2 JP H0637906Y2
Authority
JP
Japan
Prior art keywords
clamp mechanism
transported object
clamp
shaped lever
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988141233U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0263990U (enExample
Inventor
真一 黒田
義雄 渡辺
香 古舘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1988141233U priority Critical patent/JPH0637906Y2/ja
Publication of JPH0263990U publication Critical patent/JPH0263990U/ja
Application granted granted Critical
Publication of JPH0637906Y2 publication Critical patent/JPH0637906Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
JP1988141233U 1988-10-31 1988-10-31 板状物体搬送装置 Expired - Lifetime JPH0637906Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988141233U JPH0637906Y2 (ja) 1988-10-31 1988-10-31 板状物体搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988141233U JPH0637906Y2 (ja) 1988-10-31 1988-10-31 板状物体搬送装置

Publications (2)

Publication Number Publication Date
JPH0263990U JPH0263990U (enExample) 1990-05-14
JPH0637906Y2 true JPH0637906Y2 (ja) 1994-10-05

Family

ID=31406126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988141233U Expired - Lifetime JPH0637906Y2 (ja) 1988-10-31 1988-10-31 板状物体搬送装置

Country Status (1)

Country Link
JP (1) JPH0637906Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017183665A (ja) * 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法

Also Published As

Publication number Publication date
JPH0263990U (enExample) 1990-05-14

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