JPH0636362A - Production of optical information recording medium - Google Patents

Abstract

PURPOSE:To prevent the sticking of dust and dirt on substrates by applying a high voltage to the inside of a chamber or irradiating the inside of the chamber with UV rays, thereby generating ionized molecules and atoms in the chamber. CONSTITUTION:An ion generator 4 operates to generate the ionized molecules and atoms in the chamber 3a in the stage when a substrate holder 1 set with the substrates 2 is transported into the chamber 3a. After the substrates are rested as they are for the prescribed period of time, a vacuum pump 5 is operated and the substrates are transferred from the chamber 3a to the chamber 3b; thereafter, a thin film forming means is operated, by which thin films are formed on the substrates 2. Pinholes are drastically decreased in such a case.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical information recording medium.

[0002]

2. Description of the Related Art In recent years, optical information recording media represented by optical disks, optical cards, disk memories for large-capacity computers, etc. have been developed and commercialized. These optical information recording media are generally formed by providing a thin film such as a recording film, a reflective film or a protective film on a substrate made of polycarbonate resin or acrylic resin by thin film forming means such as sputtering or vapor deposition means.

By the way, it is well known that the above-mentioned thin film formation requires extremely high precision in terms of film thickness and also requires high precision in its uniformity. For example, if dust or dirt is mixed in the thin film, it becomes a fatal defective product. Therefore, the production line is a clean room,
In addition, efforts are being made to carefully blow air before film formation.

[0004]

However, even if the substrate is kept in a clean state before film formation, dust and dirt are mixed in the thin film to form many pinholes, which adversely affects the recording / reproducing characteristics. There was also a thing. Therefore, the object of the present invention is to
An object of the present invention is to provide a recording medium capable of forming a uniform and highly accurate thin film and having excellent recording / reproducing characteristics.

[0005]

[Means for Solving the Problems] As a result of intensive research into the above problems, it has been found that the above problems are caused by the following reasons. That is, a clean substrate is put into the chamber, and after the chamber is evacuated to a vacuum, an operation such as sputtering is performed. At the initial stage of pulling the atmospheric pressure to a vacuum, the suction force is applied to the air in the chamber. It was discovered that convection is caused in the air in the chamber due to the action, and dust and dust that rises at this time adheres to the substrate, forming numerous pinholes.

Therefore, in the initial stage of drawing a vacuum from the atmospheric pressure, even if suction force acts on the air in the chamber to cause convection in the air in the chamber, it is only necessary to prevent dust and dirt from rising. Understandably, the effort for this was earnestly done, but it was a waste of effort. Then, as a result of conducting research from the viewpoint of changing the viewpoint by 180 °, it has been found that the dust and the dust soaring adhere to the substrate because the substrate itself is slightly charged with static electricity.

[0007] As a result of earnestly promoting research based on this knowledge, the removal of static electricity from the substrate,
For example, it has been found that it is sufficient to keep the substrate in an ionized atmosphere. The present invention has been achieved based on the above, and an object of the present invention is a method for manufacturing an optical information recording medium by depositing a thin film on a substrate, which is a thin film deposition apparatus for a substrate. A carrying-in step of carrying in the inside, a depositing step of depositing a thin film on the substrate, a removing step of removing static electricity of the substrate before the deposition step, and an exhausting step of exhausting air in the thin film deposition apparatus after the removing step. And an optical information recording medium manufacturing method.

In particular, a method of manufacturing an optical information recording medium by depositing a thin film on a substrate, which comprises a carrying-in step of loading the substrate into a thin film deposition apparatus, and a deposition step of depositing the thin film on the substrate, A method for manufacturing an optical information recording medium, comprising: an ionization step of generating ions in a thin film deposition apparatus before the deposition step; and an exhaust step of exhausting air in the thin film deposition apparatus after the ionization step. To be achieved.

That is, for example, before a thin film forming operation such as sputtering, a high voltage is applied to the chamber,
When ionized molecules and atoms are generated in the chamber by irradiating with ultraviolet rays, the static electricity of the substrate is neutralized and removed by this, and even if dust or dust rises in the initial stage of vacuum evacuation, In contrast, it is no longer attracted positively, and dust and dirt are not much attached to the substrate.

Therefore, even if a thin film is deposited in the subsequent step, the phenomenon of forming many pinholes as before does not occur, and an optical information recording medium excellent in recording / reproducing characteristics can be obtained. It became.

[0011]

1 is a schematic view of an apparatus used for carrying out a method for manufacturing an optical information recording medium according to the present invention. In the figure,
Reference numeral 1 is a substrate holding device, and 2 is a substrate set in the substrate holding device 1. Reference numerals 3a and 3b are chambers forming a thin film forming apparatus. An ion generator 4 is provided in the chamber 3a. When the ion generator 4 is turned on, ionized molecules and atoms are generated in the chamber 3a. It is configured to be.

A thin film forming means is provided in the chamber 3b. When the substrate holding device 1 is transferred from the chamber 3a to the chamber 3b by a predetermined transfer mechanism, the substrate 2 set on the substrate holding device 1 is And a thin film is formed. 5 is a chamber 3a,
It is a vacuum pump connected to the inside of 3b.

In the apparatus configured as described above, the substrate holding device 1 in which the substrate 2 is set in the chamber 3a
The ion generator 4 is activated at the stage when the
Ionized molecules and atoms are generated in the chamber 3a. Then, after being left as it is for a predetermined time, the vacuum pump 5 is operated to evacuate the chambers 3a and 3b, and the substrate holding device 1 on which the substrate 2 is set is transferred from the chamber 3a to the chamber 3b. The thin film forming means is operated to form a thin film on the substrate 2.

The magneto-optical disk 1 thus obtained
Byte error rate was measured for 00000 sheets
However, the average value is 4.0 x 10^-6(As in the present invention
A conventional magneto-optical disk bite created without any process
The error rate is 6.0 x 10 ^-Five) And the pinhole
It can be seen that it is significantly less.

[0015]

[Effect] Since the substrate is neutralized before the thin film is formed, even if dust or dirt blows up at the initial stage of vacuum exhaust, it is not actively attracted to the substrate, and dust on the substrate is prevented. No dust or dirt is attached and many pinholes are not formed as before, and an optical information recording medium excellent in recording / reproducing characteristics can be obtained with a high manufacturing yield.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an apparatus for manufacturing an optical information recording medium according to the present invention.

[Explanation of symbols]

 1 substrate holding device 2 substrates 3a, 3b chamber 4 ion generator 5 vacuum pump

Claims (2)

[Claims] 1. A method of manufacturing an optical information recording medium by depositing a thin film on a substrate, comprising: a carry-in step of loading the substrate into a thin film deposition apparatus; a depositing step of depositing a thin film on the substrate; A method for manufacturing an optical information recording medium, comprising: a removal step of removing static electricity from a substrate in a stage before the deposition step, and an exhaust step of exhausting air in a thin film deposition apparatus after the removal step. 2. A method for manufacturing an optical information recording medium by depositing a thin film on a substrate, comprising: a carry-in step of loading the substrate into a thin film depositing apparatus; a depositing step of depositing a thin film on the substrate; A method of manufacturing an optical information recording medium, comprising: an ionization step of generating ions in the thin film deposition apparatus before the deposition step, and an exhaust step of exhausting air in the thin film deposition apparatus after the ionization step.