JPH0632679Y2 - ウエーハ保持装置 - Google Patents

ウエーハ保持装置

Info

Publication number
JPH0632679Y2
JPH0632679Y2 JP1988153489U JP15348988U JPH0632679Y2 JP H0632679 Y2 JPH0632679 Y2 JP H0632679Y2 JP 1988153489 U JP1988153489 U JP 1988153489U JP 15348988 U JP15348988 U JP 15348988U JP H0632679 Y2 JPH0632679 Y2 JP H0632679Y2
Authority
JP
Japan
Prior art keywords
wafer
holding
rods
rod
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988153489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0273733U (enrdf_load_stackoverflow
Inventor
芳夫 竹間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukui Shin Etsu Quartz Co Ltd
Original Assignee
Fukui Shin Etsu Quartz Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukui Shin Etsu Quartz Co Ltd filed Critical Fukui Shin Etsu Quartz Co Ltd
Priority to JP1988153489U priority Critical patent/JPH0632679Y2/ja
Publication of JPH0273733U publication Critical patent/JPH0273733U/ja
Application granted granted Critical
Publication of JPH0632679Y2 publication Critical patent/JPH0632679Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1988153489U 1988-11-28 1988-11-28 ウエーハ保持装置 Expired - Fee Related JPH0632679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153489U JPH0632679Y2 (ja) 1988-11-28 1988-11-28 ウエーハ保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153489U JPH0632679Y2 (ja) 1988-11-28 1988-11-28 ウエーハ保持装置

Publications (2)

Publication Number Publication Date
JPH0273733U JPH0273733U (enrdf_load_stackoverflow) 1990-06-05
JPH0632679Y2 true JPH0632679Y2 (ja) 1994-08-24

Family

ID=31429374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153489U Expired - Fee Related JPH0632679Y2 (ja) 1988-11-28 1988-11-28 ウエーハ保持装置

Country Status (1)

Country Link
JP (1) JPH0632679Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS434952Y1 (enrdf_load_stackoverflow) * 1965-03-03 1968-03-02
JPS5067558A (enrdf_load_stackoverflow) * 1973-10-15 1975-06-06
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles

Also Published As

Publication number Publication date
JPH0273733U (enrdf_load_stackoverflow) 1990-06-05

Similar Documents

Publication Publication Date Title
JP4467028B2 (ja) 縦型ウェーハ支持治具
US5219079A (en) Wafer jig
JPH0632679Y2 (ja) ウエーハ保持装置
JPH09232412A (ja) ウェーハ積載のための垂直型ファーネス用のボート
JPH03102849A (ja) ウェハアダプタ及び露光装置
JP2996355B2 (ja) 縦型収納治具
JPH09237781A (ja) 熱処理用ボ−ト
JPH06132390A (ja) ウェーハボート
JP3005976B2 (ja) 半導体ウェーハ支持装置
JPH01239853A (ja) 籠形ボート
JPH05229581A (ja) ウエハキャリアケース
JP3020287U (ja) 薄板用支持容器
JP2533551Y2 (ja) 半導体ウエハ保持治具
JPH05152228A (ja) ボートへのウエーハ搭載方法
JPH0810680B2 (ja) 熱処理用ボ−ト
JP2001093969A (ja) 基板トレイおよび基板収納方法
JPH0982791A (ja) カセット
JP2004014829A (ja) 熱処理装置及び半導体デバイスの製造方法
JPH11286333A (ja) 基板収納装置および基板収納方法
JPH0222535B2 (enrdf_load_stackoverflow)
TWI648510B (zh) 固定盤單元
JP2000286326A (ja) 基板処理装置
JP2001313266A (ja) 熱処理用ボート
JP2001223173A (ja) 縦形半導体製造装置
KR20040052375A (ko) 급속 열처리 장치의 공정 챔버

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees