JPH0631720Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPH0631720Y2
JPH0631720Y2 JP1855987U JP1855987U JPH0631720Y2 JP H0631720 Y2 JPH0631720 Y2 JP H0631720Y2 JP 1855987 U JP1855987 U JP 1855987U JP 1855987 U JP1855987 U JP 1855987U JP H0631720 Y2 JPH0631720 Y2 JP H0631720Y2
Authority
JP
Japan
Prior art keywords
suction table
semiconductor wafer
slider
wafer
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1855987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63174443U (enrdf_load_stackoverflow
Inventor
晴城 坂口
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1855987U priority Critical patent/JPH0631720Y2/ja
Publication of JPS63174443U publication Critical patent/JPS63174443U/ja
Application granted granted Critical
Publication of JPH0631720Y2 publication Critical patent/JPH0631720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
  • Special Conveying (AREA)
JP1855987U 1987-02-10 1987-02-10 半導体製造装置 Expired - Lifetime JPH0631720Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1855987U JPH0631720Y2 (ja) 1987-02-10 1987-02-10 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1855987U JPH0631720Y2 (ja) 1987-02-10 1987-02-10 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS63174443U JPS63174443U (enrdf_load_stackoverflow) 1988-11-11
JPH0631720Y2 true JPH0631720Y2 (ja) 1994-08-22

Family

ID=30812342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1855987U Expired - Lifetime JPH0631720Y2 (ja) 1987-02-10 1987-02-10 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0631720Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114852662A (zh) * 2022-06-09 2022-08-05 苏州辉垦电子科技有限公司 一种手动导片机

Also Published As

Publication number Publication date
JPS63174443U (enrdf_load_stackoverflow) 1988-11-11

Similar Documents

Publication Publication Date Title
CN111276427B (zh) 晶片分割装置
JP2004207606A (ja) ウェーハサポートプレート
JPH10326820A (ja) 基板搬送装置
TWI436858B (zh) 基板研磨裝置及使用該基板研磨裝置之方法
JPH0631720Y2 (ja) 半導体製造装置
JPH07130692A (ja) 平面研削装置
JP4119170B2 (ja) チャックテーブル
JP3446158B2 (ja) 基板搬送処理装置
JP5676168B2 (ja) 研削装置
JPH07130637A (ja) 半導体製造装置
JP4564695B2 (ja) ウェーハカセット並びに半導体ウェーハの搬入方法及び搬出方法
JP2003077982A (ja) 搬送装置
JPS63131535A (ja) 基板支持装置
JP3173918B2 (ja) 基板搬送ハンドおよびこれを備えた基板搬送装置
JP3898401B2 (ja) 部品供給装置
JPH05129417A (ja) 板状体の処理装置
JPH1179390A (ja) 半導体ウェーハ搬出入手段
JP4253160B2 (ja) 半導体ウエーハの搬送装置
JPH01152634A (ja) 半導体ペレットの組立装置
CN118513707B (zh) 一种高效的硅片加工激光机及加工方法
JP2003266266A (ja) 半導体ウエーハの搬送装置
JPH0643026Y2 (ja) 薄板状被処理物の搬送治具
JP3205525B2 (ja) 基板の取出装置，搬入装置及び取出搬入装置
JP3091469B2 (ja) 半導体装置の製造方法
JP2913510B2 (ja) 搬送装置