JPH0630849Y2 - 化学気相生成装置 - Google Patents

化学気相生成装置

Info

Publication number
JPH0630849Y2
JPH0630849Y2 JP1324989U JP1324989U JPH0630849Y2 JP H0630849 Y2 JPH0630849 Y2 JP H0630849Y2 JP 1324989 U JP1324989 U JP 1324989U JP 1324989 U JP1324989 U JP 1324989U JP H0630849 Y2 JPH0630849 Y2 JP H0630849Y2
Authority
JP
Japan
Prior art keywords
quartz
susceptor
loop
inert gas
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1324989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02106460U (es
Inventor
好英 遠藤
文秀 池田
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1324989U priority Critical patent/JPH0630849Y2/ja
Publication of JPH02106460U publication Critical patent/JPH02106460U/ja
Application granted granted Critical
Publication of JPH0630849Y2 publication Critical patent/JPH0630849Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1324989U 1989-02-06 1989-02-06 化学気相生成装置 Expired - Lifetime JPH0630849Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1324989U JPH0630849Y2 (ja) 1989-02-06 1989-02-06 化学気相生成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1324989U JPH0630849Y2 (ja) 1989-02-06 1989-02-06 化学気相生成装置

Publications (2)

Publication Number Publication Date
JPH02106460U JPH02106460U (es) 1990-08-23
JPH0630849Y2 true JPH0630849Y2 (ja) 1994-08-17

Family

ID=31223394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1324989U Expired - Lifetime JPH0630849Y2 (ja) 1989-02-06 1989-02-06 化学気相生成装置

Country Status (1)

Country Link
JP (1) JPH0630849Y2 (es)

Also Published As

Publication number Publication date
JPH02106460U (es) 1990-08-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term