JPH02106460U - - Google Patents
Info
- Publication number
- JPH02106460U JPH02106460U JP1324989U JP1324989U JPH02106460U JP H02106460 U JPH02106460 U JP H02106460U JP 1324989 U JP1324989 U JP 1324989U JP 1324989 U JP1324989 U JP 1324989U JP H02106460 U JPH02106460 U JP H02106460U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- quartz
- loop
- chemical vapor
- generation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 4
- 239000012808 vapor phase Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1324989U JPH0630849Y2 (ja) | 1989-02-06 | 1989-02-06 | 化学気相生成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1324989U JPH0630849Y2 (ja) | 1989-02-06 | 1989-02-06 | 化学気相生成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02106460U true JPH02106460U (es) | 1990-08-23 |
| JPH0630849Y2 JPH0630849Y2 (ja) | 1994-08-17 |
Family
ID=31223394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1324989U Expired - Lifetime JPH0630849Y2 (ja) | 1989-02-06 | 1989-02-06 | 化学気相生成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630849Y2 (es) |
-
1989
- 1989-02-06 JP JP1324989U patent/JPH0630849Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630849Y2 (ja) | 1994-08-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |