JPH0418428U - - Google Patents

Info

Publication number
JPH0418428U
JPH0418428U JP5834990U JP5834990U JPH0418428U JP H0418428 U JPH0418428 U JP H0418428U JP 5834990 U JP5834990 U JP 5834990U JP 5834990 U JP5834990 U JP 5834990U JP H0418428 U JPH0418428 U JP H0418428U
Authority
JP
Japan
Prior art keywords
gas introduction
wafer
introduction nozzle
cvd apparatus
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5834990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5834990U priority Critical patent/JPH0418428U/ja
Publication of JPH0418428U publication Critical patent/JPH0418428U/ja
Pending legal-status Critical Current

Links

JP5834990U 1990-06-01 1990-06-01 Pending JPH0418428U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5834990U JPH0418428U (es) 1990-06-01 1990-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5834990U JPH0418428U (es) 1990-06-01 1990-06-01

Publications (1)

Publication Number Publication Date
JPH0418428U true JPH0418428U (es) 1992-02-17

Family

ID=31583880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5834990U Pending JPH0418428U (es) 1990-06-01 1990-06-01

Country Status (1)

Country Link
JP (1) JPH0418428U (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0936050A (ja) * 1995-07-25 1997-02-07 Mitsubishi Electric Corp 常圧ｃｖｄ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0936050A (ja) * 1995-07-25 1997-02-07 Mitsubishi Electric Corp 常圧ｃｖｄ装置

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