JPH0628775Y2 - 透過型電子顕微鏡 - Google Patents

透過型電子顕微鏡

Info

Publication number
JPH0628775Y2
JPH0628775Y2 JP13921089U JP13921089U JPH0628775Y2 JP H0628775 Y2 JPH0628775 Y2 JP H0628775Y2 JP 13921089 U JP13921089 U JP 13921089U JP 13921089 U JP13921089 U JP 13921089U JP H0628775 Y2 JPH0628775 Y2 JP H0628775Y2
Authority
JP
Japan
Prior art keywords
chamber
electron beam
photographing
room
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13921089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377359U (enrdf_load_html_response
Inventor
敏和 本田
雅夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP13921089U priority Critical patent/JPH0628775Y2/ja
Publication of JPH0377359U publication Critical patent/JPH0377359U/ja
Application granted granted Critical
Publication of JPH0628775Y2 publication Critical patent/JPH0628775Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13921089U 1989-11-30 1989-11-30 透過型電子顕微鏡 Expired - Lifetime JPH0628775Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13921089U JPH0628775Y2 (ja) 1989-11-30 1989-11-30 透過型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13921089U JPH0628775Y2 (ja) 1989-11-30 1989-11-30 透過型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPH0377359U JPH0377359U (enrdf_load_html_response) 1991-08-02
JPH0628775Y2 true JPH0628775Y2 (ja) 1994-08-03

Family

ID=31686271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13921089U Expired - Lifetime JPH0628775Y2 (ja) 1989-11-30 1989-11-30 透過型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPH0628775Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0377359U (enrdf_load_html_response) 1991-08-02

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