JPH0625014Y2 - ウエ−ハカセツト - Google Patents

ウエ−ハカセツト

Info

Publication number
JPH0625014Y2
JPH0625014Y2 JP1987046049U JP4604987U JPH0625014Y2 JP H0625014 Y2 JPH0625014 Y2 JP H0625014Y2 JP 1987046049 U JP1987046049 U JP 1987046049U JP 4604987 U JP4604987 U JP 4604987U JP H0625014 Y2 JPH0625014 Y2 JP H0625014Y2
Authority
JP
Japan
Prior art keywords
cassette
wafer
wafer cassette
identification
side plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987046049U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63153517U (enExample
Inventor
和憲 佐伯
秀幸 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP1987046049U priority Critical patent/JPH0625014Y2/ja
Publication of JPS63153517U publication Critical patent/JPS63153517U/ja
Application granted granted Critical
Publication of JPH0625014Y2 publication Critical patent/JPH0625014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1987046049U 1987-03-28 1987-03-28 ウエ−ハカセツト Expired - Lifetime JPH0625014Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987046049U JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Publications (2)

Publication Number Publication Date
JPS63153517U JPS63153517U (enExample) 1988-10-07
JPH0625014Y2 true JPH0625014Y2 (ja) 1994-06-29

Family

ID=30865350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987046049U Expired - Lifetime JPH0625014Y2 (ja) 1987-03-28 1987-03-28 ウエ−ハカセツト

Country Status (1)

Country Link
JP (1) JPH0625014Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS6149447U (enExample) * 1984-09-03 1986-04-03
JPS62163949U (enExample) * 1986-04-09 1987-10-17

Also Published As

Publication number Publication date
JPS63153517U (enExample) 1988-10-07

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